Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
ALUMINA SINTERED BODY AND MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS, AND MEMBER FOR LIQUID CRYSTAL PANEL MANUFACTURING APPARATUS
PROBLEM TO BE SOLVED: To provide an alumina sintered body which has high corrosion resistance and furthermore has low dielectric loss tangent despite including an oxide of Na, and to provided a member for a semiconductor manufacturing apparatus and a member for a liquid crystal panel manufacturing apparatus.SOLUTION: The alumina sintered body of the present invention has a Na content of 30 ppm or more and 500 ppm or less in terms of NaO and an Al content of 99.4 mass% or more in terms of AlOin 100 mass% of whole component, and has a value of dielectric loss tangent in 8.5 GHz of 0.5 times or less of a value of the Na content in terms of NaO.
【課題】 高い耐食性を有しつつ、Ｎａの酸化物を含んでいながらも、誘電正接の低いアルミナ質焼結体および半導体製造装置用部材ならびに液晶パネル製造装置用部材を提供する。【解決手段】 本発明のアルミナ質焼結体は、全構成成分100質量％のうち、ＮａをＮａ２Ｏ換算した含有量が30ｐｐｍ以上500ｐｐｍ以下であり、ＡｌをＡｌ２Ｏ３換算した含有量が99.4質量％以上であり、8.5ＧＨｚにおける誘電正接の値が、ＮａをＮａ２Ｏ換算した含有量の値の0.5倍以下である。【選択図】 なし
ALUMINA SINTERED BODY AND MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS, AND MEMBER FOR LIQUID CRYSTAL PANEL MANUFACTURING APPARATUS
PROBLEM TO BE SOLVED: To provide an alumina sintered body which has high corrosion resistance and furthermore has low dielectric loss tangent despite including an oxide of Na, and to provided a member for a semiconductor manufacturing apparatus and a member for a liquid crystal panel manufacturing apparatus.SOLUTION: The alumina sintered body of the present invention has a Na content of 30 ppm or more and 500 ppm or less in terms of NaO and an Al content of 99.4 mass% or more in terms of AlOin 100 mass% of whole component, and has a value of dielectric loss tangent in 8.5 GHz of 0.5 times or less of a value of the Na content in terms of NaO.
【課題】 高い耐食性を有しつつ、Ｎａの酸化物を含んでいながらも、誘電正接の低いアルミナ質焼結体および半導体製造装置用部材ならびに液晶パネル製造装置用部材を提供する。【解決手段】 本発明のアルミナ質焼結体は、全構成成分100質量％のうち、ＮａをＮａ２Ｏ換算した含有量が30ｐｐｍ以上500ｐｐｍ以下であり、ＡｌをＡｌ２Ｏ３換算した含有量が99.4質量％以上であり、8.5ＧＨｚにおける誘電正接の値が、ＮａをＮａ２Ｏ換算した含有量の値の0.5倍以下である。【選択図】 なし
ALUMINA SINTERED BODY AND MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUS, AND MEMBER FOR LIQUID CRYSTAL PANEL MANUFACTURING APPARATUS
アルミナ質焼結体および半導体製造装置用部材ならびに液晶パネル製造装置用部材
FURUDATE KENICHI (Autor:in) / OCHIAI HITOMI (Autor:in) / TAKENOSHITA HIDEHIRO (Autor:in)
10.09.2015
Patent
Elektronische Ressource
Japanisch
IPC:
C04B
Kalk
,
LIME
Alumina sintered body, member including the same, and semiconductor manufacturing apparatus
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