Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
SILICON CARBIDE MEMBER
PROBLEM TO BE SOLVED: To provide a silicon carbide member capable of increasing strength and suppressing particle contamination.SOLUTION: A silicon carbide member 1 comprises a substrate made of a silicon carbide sintered body and a coating layer 3 on the substrate, in which an outermost surface layer 3a of the coating layer 3 is made of an O-Si-C layer. Further, the silicon carbide member 1 has a second layer 3b made of an O-Si layer as an underlay of the O-Si-C layer and a third layer 3c made of a Si-C-O layer as an underlay of the O-Si layer.EFFECT: The silicon carbide member 1 satisfying the condition of the above layer structure has high strength and little particle contamination, and accordingly, has a long service life and high reliability. The member can be suitably used as a member for a semiconductor or a liquid crystal device.SELECTED DRAWING: Figure 1
【課題】強度向上およびパーティクル汚染を抑制可能な炭化珪素質部材の提供。【解決手段】炭化珪素質焼結体からなる基材上に被覆層３を備えてなり、被覆層３の最表層３ａがＯ−Ｓｉ−Ｃ層からなる炭化珪素質部材１。更に、前記Ｏ−Ｓｉ−Ｃ層の下層である第２層３ｂがＯ−Ｓｉ層であり、該Ｏ−Ｓｉ層の下層である第３層３ｃがＳｉ−Ｃ−Ｏ層である炭化珪素質部材１。【効果】前記構成を満たしていることにより、炭化珪素質部材１は、高い強度を有するとともに、パーティクル汚染が少ないため、長寿命かつ高い信頼性を有する。従って、半導体や液晶装置用の部材に好適に用いることができる。【選択図】図１
SILICON CARBIDE MEMBER
PROBLEM TO BE SOLVED: To provide a silicon carbide member capable of increasing strength and suppressing particle contamination.SOLUTION: A silicon carbide member 1 comprises a substrate made of a silicon carbide sintered body and a coating layer 3 on the substrate, in which an outermost surface layer 3a of the coating layer 3 is made of an O-Si-C layer. Further, the silicon carbide member 1 has a second layer 3b made of an O-Si layer as an underlay of the O-Si-C layer and a third layer 3c made of a Si-C-O layer as an underlay of the O-Si layer.EFFECT: The silicon carbide member 1 satisfying the condition of the above layer structure has high strength and little particle contamination, and accordingly, has a long service life and high reliability. The member can be suitably used as a member for a semiconductor or a liquid crystal device.SELECTED DRAWING: Figure 1
【課題】強度向上およびパーティクル汚染を抑制可能な炭化珪素質部材の提供。【解決手段】炭化珪素質焼結体からなる基材上に被覆層３を備えてなり、被覆層３の最表層３ａがＯ−Ｓｉ−Ｃ層からなる炭化珪素質部材１。更に、前記Ｏ−Ｓｉ−Ｃ層の下層である第２層３ｂがＯ−Ｓｉ層であり、該Ｏ−Ｓｉ層の下層である第３層３ｃがＳｉ−Ｃ−Ｏ層である炭化珪素質部材１。【効果】前記構成を満たしていることにより、炭化珪素質部材１は、高い強度を有するとともに、パーティクル汚染が少ないため、長寿命かつ高い信頼性を有する。従って、半導体や液晶装置用の部材に好適に用いることができる。【選択図】図１
SILICON CARBIDE MEMBER
炭化珪素質部材
HIMENO OSAMU (Autor:in) / TAKENOUCHI KAZUNORI (Autor:in)
01.09.2016
Patent
Elektronische Ressource
Japanisch
IPC:
C04B
Kalk
,
LIME