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SILICON NITRIDE CERAMIC SINTERED COMPACT AND METHOD FOR PRODUCING THE SAME
PROBLEM TO BE SOLVED: To provide a silicon nitride ceramic sintered compact more excellent in deflective strength and thermal shock resistance, and a method for producing the same.SOLUTION: Provided is a silicon nitride ceramic sintered compact comprising a β-SiNphase as the main phase, a YSiOphase as a grain boundary phase, an SiNO phase and SiC fine particles dispersed at a number density of 1 to 10 pieces/μmand also at the average intervals of 0.3 μm or higher, where, in the SiNO phase, 50 to 80% of the SiNO phase is present on the boundary face between the main phase and the grain boundary phase, 50% or more of the SiC fine particles has the average particle diameter of 0.05 μm or lower and an aspect ratio of 1.2 or lower, and the total content of Al, Fe, Na, Cl and C is 100 ppm or lower.SELECTED DRAWING: None
【課題】抗折強さ及び耐熱衝撃性により優れた窒化珪素質セラミックス焼結体及びその製造方法を提供する。【解決手段】主相のβ−Si3N4相と、粒界相のY2Si2O7相と、Si2N2O相と、個数密度1〜10個/μm2かつ平均間隔0.3μm以上で分散されたSiC微粒子と、を有し、前記Si2N2O相のうちの50〜80%のSi2N2O相が前記主相と前記粒界相との界面に存在し、前記SiC微粒子の50%以上が平均粒径0.05μm以下かつアスペクト比1.2以下であり、Al、Fe、Na、Cl、及びCの総含有量が100ppm以下であることを特徴とする窒化珪素質セラミックス焼結体を採用する。【選択図】なし
SILICON NITRIDE CERAMIC SINTERED COMPACT AND METHOD FOR PRODUCING THE SAME
PROBLEM TO BE SOLVED: To provide a silicon nitride ceramic sintered compact more excellent in deflective strength and thermal shock resistance, and a method for producing the same.SOLUTION: Provided is a silicon nitride ceramic sintered compact comprising a β-SiNphase as the main phase, a YSiOphase as a grain boundary phase, an SiNO phase and SiC fine particles dispersed at a number density of 1 to 10 pieces/μmand also at the average intervals of 0.3 μm or higher, where, in the SiNO phase, 50 to 80% of the SiNO phase is present on the boundary face between the main phase and the grain boundary phase, 50% or more of the SiC fine particles has the average particle diameter of 0.05 μm or lower and an aspect ratio of 1.2 or lower, and the total content of Al, Fe, Na, Cl and C is 100 ppm or lower.SELECTED DRAWING: None
【課題】抗折強さ及び耐熱衝撃性により優れた窒化珪素質セラミックス焼結体及びその製造方法を提供する。【解決手段】主相のβ−Si3N4相と、粒界相のY2Si2O7相と、Si2N2O相と、個数密度1〜10個/μm2かつ平均間隔0.3μm以上で分散されたSiC微粒子と、を有し、前記Si2N2O相のうちの50〜80%のSi2N2O相が前記主相と前記粒界相との界面に存在し、前記SiC微粒子の50%以上が平均粒径0.05μm以下かつアスペクト比1.2以下であり、Al、Fe、Na、Cl、及びCの総含有量が100ppm以下であることを特徴とする窒化珪素質セラミックス焼結体を採用する。【選択図】なし
SILICON NITRIDE CERAMIC SINTERED COMPACT AND METHOD FOR PRODUCING THE SAME
窒化珪素質セラミックス焼結体及びその製造方法
MATSUBAYASHI SHIGEHARU (Autor:in)
05.09.2016
Patent
Elektronische Ressource
Japanisch
IPC:
C04B
Kalk
,
LIME
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