Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
PROBLEM TO BE SOLVED: To provide a sample holder improved in long-term reliability.SOLUTION: There is provided a sample holder, comprising: a substrate made of ceramic and having a sample holding face at either main face; a supporting body provided at the other main face of the substrate; and a joining layer 5 for joining the substrate and the supporting body. The joining layer 5 is made of silver and copper, and, in the case the joining layer is divided to the three regions of a substrate side part 51, the central part 52, and a supporting side part 53 from the substrate side, the content of the silver in the central part 52 is higher than the content of the silver in the substrate side part 51 and the supporting body side part 53.SELECTED DRAWING: Figure 4
【課題】長期信頼性が向上した試料保持具の提供。【解決手段】セラミックスからなり一方の主面に試料保持面を有する基体と、前記基体の他方の主面に設けられた支持体と、前記基体と前記支持体とを接合する接合層５とを有しており、該接合層５は銀および銅から成るとともに、前記接合層を前記基体側から基体側部５１、中央部５２および支持体側部５３の３つの領域に分けたときに、前記中央部５２における銀の含有率が前記基体側部５１および前記支持体側部５３における銀の含有率よりも大きい試料保治具である。【選択図】図４
PROBLEM TO BE SOLVED: To provide a sample holder improved in long-term reliability.SOLUTION: There is provided a sample holder, comprising: a substrate made of ceramic and having a sample holding face at either main face; a supporting body provided at the other main face of the substrate; and a joining layer 5 for joining the substrate and the supporting body. The joining layer 5 is made of silver and copper, and, in the case the joining layer is divided to the three regions of a substrate side part 51, the central part 52, and a supporting side part 53 from the substrate side, the content of the silver in the central part 52 is higher than the content of the silver in the substrate side part 51 and the supporting body side part 53.SELECTED DRAWING: Figure 4
【課題】長期信頼性が向上した試料保持具の提供。【解決手段】セラミックスからなり一方の主面に試料保持面を有する基体と、前記基体の他方の主面に設けられた支持体と、前記基体と前記支持体とを接合する接合層５とを有しており、該接合層５は銀および銅から成るとともに、前記接合層を前記基体側から基体側部５１、中央部５２および支持体側部５３の３つの領域に分けたときに、前記中央部５２における銀の含有率が前記基体側部５１および前記支持体側部５３における銀の含有率よりも大きい試料保治具である。【選択図】図４
SAMPLE HOLDER
試料保持具
INOUE HIRONORI (Autor:in)
18.05.2017
Patent
Elektronische Ressource
Japanisch
A Sample Holder for Determining Material Properties
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