ALUMINUM NITRIDE SINTERED BODY AND METHOD FOR PRODUCING THE SAME: Fid-Bau Portal

ALUMINUM NITRIDE SINTERED BODY AND METHOD FOR PRODUCING THE SAME

KATO DAISUKE / YOSHIDA KENJI / TAKAHASHI MITSUTAKA

PROBLEM TO BE SOLVED: To provide an AlN sintered body where grains of a sintering auxiliary agent phase do not shed and voids do not occur, even when conducting mirror polishing of the surface.SOLUTION: The method for producing an AlN sintered body comprises: mixing AlN powder and YOpowder of raw material with carbon powder to obtain mixed raw material powder; conducting primary firing of the mixed raw material powder to make intermediate raw material powder; treating the intermediate raw material powder by decarbonization to obtain decarbonization powder; adding binder or the like to the decarbonization powder and then molding them to obtain a molded body; and conducting secondary firing of the molded body to make the AlN sintered body, which has ten pieces or more of auxiliary agent phase grains with the grain diameter of 2 μm or smaller within 400 μmof the mirror polishing surface, and has three or less of voids per 10000 μm.SELECTED DRAWING: Figure 1

【課題】表面の鏡面研磨を行っても焼結助剤相の粒子が脱粒せず、ボイドが生じないＡｌＮ焼結体の提供。【解決手段】原料のＡｌＮ粉とＹ２Ｏ３粉とカーボン粉末とを混合して混合原料粉にする。この混合原料粉を一次焼成し、中間原料粉にする。この中間原料粉を脱炭処理し、脱炭粉末を得る。脱炭粉末にバインダー等を加えて成型し、成形体を得る。該成形体を二次焼成することによる、鏡面研磨面の４００μｍ２内に粒径が２μｍ以下の助剤相粒子が１０個以上存在し、かつ、ボイドが１００００μｍ２あたり３個以下となるＡｌＮ焼結体。【選択図】図１

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