BORON CARBIDE SINTERED BODY AND ETCHER INCLUDING THE SAME: Fid-Bau Portal

Fachinformationsdienst BAUdigital

Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik

BORON CARBIDE SINTERED BODY AND ETCHER INCLUDING THE SAME

HWANG SUNG SIC / LEE JAE BUM / OH JUN ROK / MIN KYOUNG YEOL / KIM KYUNG IN / KANG JUNG KUN

To provide a boron carbide sintered body having excellent properties, and to provide an etcher including the same at least partially.SOLUTION: A boron carbide sintered body includes necked boron carbide-containing particles. A value of thermal conductivity of the boron carbide sintered body, measured at 400°C, is 27 W/m*K or less. The boron carbide sintered body has a value of thermal conductivity in a specific range and has excellent corrosion resistance and anti-etching properties.SELECTED DRAWING: Figure 3

【課題】優れた特性を有する炭化ホウ素焼結体及びこれを少なくとも一部に含むエッチング装置を提供する.【解決手段】炭化ホウ素焼結体は、炭化ホウ素含有粒子がネッキングされたものであって、４００℃で測定した熱伝導度の値が約２７Ｗ／（ｍ＊ｋ）以下であるなどの特徴を有する。前記炭化ホウ素焼結体は、特定の範囲内の熱伝導度の値を有し、優れた耐食性、耐エッチング特性を有する。【選択図】図３

Zugriff

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

BORON CARBIDE SINTERED BODY AND ETCHER INCLUDING THE SAME

HWANG SUNG SIC / LEE JAE BUM / OH JUN ROK / MIN KYOUNG YEOL / KIM KYUNG IN / KANG JUNG KUN

To provide a boron carbide sintered body having excellent properties, and to provide an etcher including the same at least partially.SOLUTION: A boron carbide sintered body includes necked boron carbide-containing particles. A value of thermal conductivity of the boron carbide sintered body, measured at 400°C, is 27 W/m*K or less. The boron carbide sintered body has a value of thermal conductivity in a specific range and has excellent corrosion resistance and anti-etching properties.SELECTED DRAWING: Figure 3

【課題】優れた特性を有する炭化ホウ素焼結体及びこれを少なくとも一部に含むエッチング装置を提供する.【解決手段】炭化ホウ素焼結体は、炭化ホウ素含有粒子がネッキングされたものであって、４００℃で測定した熱伝導度の値が約２７Ｗ／（ｍ＊ｋ）以下であるなどの特徴を有する。前記炭化ホウ素焼結体は、特定の範囲内の熱伝導度の値を有し、優れた耐食性、耐エッチング特性を有する。【選択図】図３

BORON CARBIDE SINTERED BODY AND ETCHER INCLUDING THE SAME

HWANG SUNG SIC / LEE JAE BUM / OH JUN ROK / MIN KYOUNG YEOL / KIM KYUNG IN / KANG JUNG KUN

To provide a boron carbide sintered body having excellent properties, and to provide an etcher including the same at least partially.SOLUTION: A boron carbide sintered body includes necked boron carbide-containing particles. A value of thermal conductivity of the boron carbide sintered body, measured at 400°C, is 27 W/m*K or less. The boron carbide sintered body has a value of thermal conductivity in a specific range and has excellent corrosion resistance and anti-etching properties.SELECTED DRAWING: Figure 3

【課題】優れた特性を有する炭化ホウ素焼結体及びこれを少なくとも一部に含むエッチング装置を提供する.【解決手段】炭化ホウ素焼結体は、炭化ホウ素含有粒子がネッキングされたものであって、４００℃で測定した熱伝導度の値が約２７Ｗ／（ｍ＊ｋ）以下であるなどの特徴を有する。前記炭化ホウ素焼結体は、特定の範囲内の熱伝導度の値を有し、優れた耐食性、耐エッチング特性を有する。【選択図】図３

Zugriff

Seitennavigation

Dokumentinformationen

Ähnliche Titel

Exportieren, teilen und zitieren

Dokumentinformationen

Titel:

BORON CARBIDE SINTERED BODY AND ETCHER INCLUDING THE SAME

Weitere Titelangaben:

炭化ホウ素焼結体及びこれを含むエッチング装置

Beteiligte:

HWANG SUNG SIC (Autor:in) / LEE JAE BUM (Autor:in) / OH JUN ROK (Autor:in) / MIN KYOUNG YEOL (Autor:in) / KIM KYUNG IN (Autor:in) / KANG JUNG KUN (Autor:in)

Erscheinungsdatum:

14.05.2020

Medientyp:

Patent

Format:

Elektronische Ressource

Sprache:

Japanisch

Klassifikation:

IPC: C04B Kalk , LIME / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES

Ähnliche Titel

BORON CARBIDE SINTERED BODY AND ETCHER INCLUDING THE SAME

HWANG SUNG SIC / LEE JAE BUM / OH JUN ROK et al. | Europäisches Patentamt | 2020

Freier Zugriff

Method for manufacturing boron carbide sintered body for plasma device and Boron carbide sintered body manufactured by the same

KIM DON HAN / KIM JIN CHUL / SEIL KWANG HEE et al. | Europäisches Patentamt | 2022

Freier Zugriff

BORON CARBIDE SINTERED BODY MANUFACTURING EQUIPMENT

LEE SU JEONG / YOU GI HYEON / SON SEONG HYEOK et al. | Europäisches Patentamt | 2022

Freier Zugriff

BORON CARBIDE SINTERED BODY AND ETCHING APPARATUS CONTAINING THE SAME

HWANG SUNG SIC / LEE JAE BUM / OH JUN ROK et al. | Europäisches Patentamt | 2021

Freier Zugriff

CUBIC BORON NITRIDE SINTERED BODY, AND TOOL INCLUDING CUBIC BORON NITRIDE SINTERED BODY

FUKUSHIMA YUICHIRO | Europäisches Patentamt | 2022

Freier Zugriff