POROUS BODY OF SILICA FOR VACUUM CHUCK: Fid-Bau Portal

POROUS BODY OF SILICA FOR VACUUM CHUCK

HASHIMOTO YUTAKA

To provide a porous body of silica for vacuum chuck, capable of obtaining high light permeability and enhancing the flatness of an adsorption face.SOLUTION: A porous body 10 of silica for a vacuum chuck is used in a chuck plate of a vacuum chuck that supports an object by sucking and adsorbing the object, and comprises a support 11 and a surface layer 12 disposed on the adsorbing side of the support 11 for an object to be adsorbed thereby. The support 11 is formed of a porous sintered body of silica particles of a particle diameter of not smaller than 30 μm and not larger than 100 μm, with its mean pore diameter being not smaller than 10 μm and not larger than 15 μm. The surface layer 12 is formed of a porous body of silica particles of a particle diameter of not smaller than 1 μm and not larger than 40 μm, with its mean pore diameter being not smaller than 3 μm and not larger than 7 μm. The mean particle diameter of the silica particles in the support 11 is larger at least by 10 μm than that of the silica particles in the surface layer 12.SELECTED DRAWING: Figure 1

【課題】高い光透過性を得ることができ、かつ、吸着面の平面度を高くすることができる真空チャック用シリカ多孔体を提供する。【解決手段】真空チャック用シリカ多孔体１０は、対象物を吸引により吸着して支持する真空チャックのチャックプレートに用いられ、支持体部１１と、この支持体部１１に対して対象物を吸着する側に配設された表面層部１２とを備えている。支持体部１１は、粒径が３０μｍ以上１００μｍ以下のシリカ粒子の多孔質焼結体よりなり、平均気孔径は１０μｍ以上１５μｍ以下である。表面層部１２は、粒径が１μｍ以上４０μｍ以下のシリカ粒子の多孔質焼結体よりなり、平均気孔径が３μｍ以上７μｍ以下である。支持体部１１のシリカ粒子の平均粒子径は、表面層部１２のシリカ粒子の平均粒子径よりも１０μｍ以上大きい。【選択図】図１

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