Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
DIELECTRIC FILM AND DIELECTRIC ELEMENT
To provide a dielectric film that has a high relative dielectric constant and high insulation resistance at high temperature.SOLUTION: A dielectric film has a complex oxide that contains main-component metal elements and sub-component component metal elements, and has a cubic system crystal structure, wherein the main-component metal elements comprise Ba, Ti, and at least one selected from Ca and Zr; the sub-component metal elements comprise at least one selected from Group 3 elements, Hf, Groups 5 to 11 elements and Group 13 elements; if the molar ratio of the main-component metal element is represented by (Ba1-xCax)z(Ti1-yZry), the relations of 0.000≤x≤0.750, 0.000≤y≤0.500, 1.040≤z≤1.100 and x+y≠0 are satisfied; and an integrated intensity of a diffraction peak of (100) plane of the complex oxide is greater than the sum of the integrated intensity of the diffraction peak of (110) plane and an integrated intensity of a diffraction peak of (111) plane.SELECTED DRAWING: Figure 1
【課題】比誘電率が高く、高温における絶縁抵抗が高い誘電体膜を提供すること。【解決手段】主成分金属元素と副成分金属元素とを含み立方晶系の結晶構造を有する複合酸化物を有する誘電体膜であって、主成分金属元素は、Ｂａと、Ｔｉと、ＣａおよびＺｒから選ばれる少なくとも１つと、であり、副成分金属元素は、第３族元素、Ｈｆ、第５から第１１族元素および第１３族元素から選ばれる少なくとも１つであり、主成分金属元素のモル比を（Ｂａ１−ｘＣａｘ）ｚ（Ｔｉ１−ｙＺｒｙ）で表した場合、０．０００≦ｘ≦０．７５０、０．０００≦ｙ≦０．５００、１．０４０≦ｚ≦１．１００かつｘ＋ｙ≠０である関係を満足し、複合酸化物の（１００）面の回折ピークの積分強度が、（１１０）面の回折ピークの積分強度と（１１１）面の回折ピークの積分強度との和よりも大きい。【選択図】図１
DIELECTRIC FILM AND DIELECTRIC ELEMENT
To provide a dielectric film that has a high relative dielectric constant and high insulation resistance at high temperature.SOLUTION: A dielectric film has a complex oxide that contains main-component metal elements and sub-component component metal elements, and has a cubic system crystal structure, wherein the main-component metal elements comprise Ba, Ti, and at least one selected from Ca and Zr; the sub-component metal elements comprise at least one selected from Group 3 elements, Hf, Groups 5 to 11 elements and Group 13 elements; if the molar ratio of the main-component metal element is represented by (Ba1-xCax)z(Ti1-yZry), the relations of 0.000≤x≤0.750, 0.000≤y≤0.500, 1.040≤z≤1.100 and x+y≠0 are satisfied; and an integrated intensity of a diffraction peak of (100) plane of the complex oxide is greater than the sum of the integrated intensity of the diffraction peak of (110) plane and an integrated intensity of a diffraction peak of (111) plane.SELECTED DRAWING: Figure 1
【課題】比誘電率が高く、高温における絶縁抵抗が高い誘電体膜を提供すること。【解決手段】主成分金属元素と副成分金属元素とを含み立方晶系の結晶構造を有する複合酸化物を有する誘電体膜であって、主成分金属元素は、Ｂａと、Ｔｉと、ＣａおよびＺｒから選ばれる少なくとも１つと、であり、副成分金属元素は、第３族元素、Ｈｆ、第５から第１１族元素および第１３族元素から選ばれる少なくとも１つであり、主成分金属元素のモル比を（Ｂａ１−ｘＣａｘ）ｚ（Ｔｉ１−ｙＺｒｙ）で表した場合、０．０００≦ｘ≦０．７５０、０．０００≦ｙ≦０．５００、１．０４０≦ｚ≦１．１００かつｘ＋ｙ≠０である関係を満足し、複合酸化物の（１００）面の回折ピークの積分強度が、（１１０）面の回折ピークの積分強度と（１１１）面の回折ピークの積分強度との和よりも大きい。【選択図】図１
DIELECTRIC FILM AND DIELECTRIC ELEMENT
誘電体膜および誘電体素子
TAKAHASHI SAORI (Autor:in) / TAKAHASHI TETSUHIRO (Autor:in) / ENDO MAKOTO (Autor:in)
14.01.2021
Patent
Elektronische Ressource
Japanisch