Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
SUBSTRATE HOLDING MEMBER AND MANUFACTURING METHOD THEREOF
To provide a substrate holding member capable of heating a substrate quickly and evenly and capable of becoming a steady-state faster and a manufacturing method thereof.SOLUTION: A substrate holding member 100 includes: a substrate holding member body 110 having a placement surface 112 of a flat plate made of a ceramic sintered body; and a heating resistance 120 embedded in the substrate holding member body 110. The substrate holding member body 110 is formed of a first area 131 and a second area 132. The first area 131 constitutes at least a part of the placement surface 112, and the second area 132 constitutes at least a side face 114 of the substrate holding member body 110. The thermal conductivity of the first area 131 is lower than that of the second area 132.SELECTED DRAWING: Figure 1
【課題】基板を素早く均一に加熱できると共に、より早く定常状態になる基板保持部材、およびその製造方法を提供する。【解決手段】基板保持部材１００であって、載置面１１２を有し、セラミックス焼結体からなる平板状の基板保持部材本体１１０と、前記基板保持部材本体１１０に埋設された発熱抵抗体１２０と、を備え、前記基板保持部材本体１１０は、第１の領域１３１および第２の領域１３２で形成され、前記第１の領域１３１は、少なくとも前記載置面１１２の一部を構成し、前記第２の領域１３２は、少なくとも前記基板保持部材本体１１０の側面１１４を構成し、前記第２の領域１３２の熱伝導率は、前記第１の領域１３１の熱伝導率より低い。【選択図】図１
SUBSTRATE HOLDING MEMBER AND MANUFACTURING METHOD THEREOF
To provide a substrate holding member capable of heating a substrate quickly and evenly and capable of becoming a steady-state faster and a manufacturing method thereof.SOLUTION: A substrate holding member 100 includes: a substrate holding member body 110 having a placement surface 112 of a flat plate made of a ceramic sintered body; and a heating resistance 120 embedded in the substrate holding member body 110. The substrate holding member body 110 is formed of a first area 131 and a second area 132. The first area 131 constitutes at least a part of the placement surface 112, and the second area 132 constitutes at least a side face 114 of the substrate holding member body 110. The thermal conductivity of the first area 131 is lower than that of the second area 132.SELECTED DRAWING: Figure 1
【課題】基板を素早く均一に加熱できると共に、より早く定常状態になる基板保持部材、およびその製造方法を提供する。【解決手段】基板保持部材１００であって、載置面１１２を有し、セラミックス焼結体からなる平板状の基板保持部材本体１１０と、前記基板保持部材本体１１０に埋設された発熱抵抗体１２０と、を備え、前記基板保持部材本体１１０は、第１の領域１３１および第２の領域１３２で形成され、前記第１の領域１３１は、少なくとも前記載置面１１２の一部を構成し、前記第２の領域１３２は、少なくとも前記基板保持部材本体１１０の側面１１４を構成し、前記第２の領域１３２の熱伝導率は、前記第１の領域１３１の熱伝導率より低い。【選択図】図１
SUBSTRATE HOLDING MEMBER AND MANUFACTURING METHOD THEREOF
基板保持部材、およびその製造方法
SEKIYA SHUSUKE (Autor:in) / TAKAHASHI KAZUYA (Autor:in)
08.04.2022
Patent
Elektronische Ressource
Japanisch
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