Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
ELECTRODE BURYING MEMBER, AND SUBSTRATE HOLDING MEMBER
To provide an electrode burying member and a substrate holding member capable of providing sharp temperature gradient to a placed substrate.SOLUTION: An electrode burying member 100 comprises: a base material 10 formed by a ceramic sintered body; and a heater electrode 20 buried in the base material 10. The base material 10 has one or more tubular cavities 30 inside the base material 10. In a vertical cross section of the base material 10, a ceiling part 32 of each cavity 30 is located at a position closer to a top face 12 of the base material 10 than an upper end surface 26 of a heater electrode layer 24 in which the heater electrode 20 is buried. A bottom part 34 of the cavity 30 is located at a position closer to a lower surface 14 opposed to the top face 12 of the base material 10 than a lower end surface 28 of the heater electrode layer 24. The heater electrode 20 is divided into a plurality of regions by means of the cavities 30.SELECTED DRAWING: Figure 1
【課題】載置された基板にシャープな温度勾配を設けることができる電極埋設部材および基板保持部材を提供する。【解決手段】電極埋設部材１００であって、セラミックス焼結体により形成された基材１０と、前記基材１０に埋設されたヒーター電極２０と、を備え、前記基材１０は、前記基材１０の内部に１または複数の管状の空洞３０を有し、前記基材１０の垂直な断面において、前記空洞３０の天井部３２は前記ヒーター電極２０が埋設されたヒーター電極層２４の上端面２６より前記基材１０の上面１２に近い位置にあり、前記空洞３０の底部３４は前記ヒーター電極層２４の下端面２８より前記基材１０の前記上面１２に対向する下面１４に近い位置にあり、前記ヒーター電極２０は、前記空洞３０によって複数の領域に区画される。【選択図】図１
ELECTRODE BURYING MEMBER, AND SUBSTRATE HOLDING MEMBER
To provide an electrode burying member and a substrate holding member capable of providing sharp temperature gradient to a placed substrate.SOLUTION: An electrode burying member 100 comprises: a base material 10 formed by a ceramic sintered body; and a heater electrode 20 buried in the base material 10. The base material 10 has one or more tubular cavities 30 inside the base material 10. In a vertical cross section of the base material 10, a ceiling part 32 of each cavity 30 is located at a position closer to a top face 12 of the base material 10 than an upper end surface 26 of a heater electrode layer 24 in which the heater electrode 20 is buried. A bottom part 34 of the cavity 30 is located at a position closer to a lower surface 14 opposed to the top face 12 of the base material 10 than a lower end surface 28 of the heater electrode layer 24. The heater electrode 20 is divided into a plurality of regions by means of the cavities 30.SELECTED DRAWING: Figure 1
【課題】載置された基板にシャープな温度勾配を設けることができる電極埋設部材および基板保持部材を提供する。【解決手段】電極埋設部材１００であって、セラミックス焼結体により形成された基材１０と、前記基材１０に埋設されたヒーター電極２０と、を備え、前記基材１０は、前記基材１０の内部に１または複数の管状の空洞３０を有し、前記基材１０の垂直な断面において、前記空洞３０の天井部３２は前記ヒーター電極２０が埋設されたヒーター電極層２４の上端面２６より前記基材１０の上面１２に近い位置にあり、前記空洞３０の底部３４は前記ヒーター電極層２４の下端面２８より前記基材１０の前記上面１２に対向する下面１４に近い位置にあり、前記ヒーター電極２０は、前記空洞３０によって複数の領域に区画される。【選択図】図１
ELECTRODE BURYING MEMBER, AND SUBSTRATE HOLDING MEMBER
電極埋設部材、および基板保持部材
TAKAHASHI KAZUYA (Autor:in)
13.10.2023
Patent
Elektronische Ressource
Japanisch
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