Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck: Fid-Bau Portal

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Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck

본 발명의 일 실시 형태에 따른 세라믹 조성물은 Al2O3를 주성분으로 하며, 제1 부성분인 SiO2를 전체 조성물에 대하여 6 내지 10중량%로, 제2 부성분인 TiO2를 전체 조성물에 대하여 0.2 내지 0.3중량%로 포함한다.

The present invention relates to a ceramic composition. According to an embodiment of the present invention, the ceramic composition contains: Al_2O_3 as a main component; 6-10 wt% of SiO_2 as a first minor component with respect to the total composition; and 0.2-0.3 wt% of TiO_2 as a second minor component with respect to the total composition. According to an embodiment of the present invention, the ceramic composition has high density owing to excellent sintering properties.

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Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck

본 발명의 일 실시 형태에 따른 세라믹 조성물은 Al2O3를 주성분으로 하며, 제1 부성분인 SiO2를 전체 조성물에 대하여 6 내지 10중량%로, 제2 부성분인 TiO2를 전체 조성물에 대하여 0.2 내지 0.3중량%로 포함한다.

The present invention relates to a ceramic composition. According to an embodiment of the present invention, the ceramic composition contains: Al_2O_3 as a main component; 6-10 wt% of SiO_2 as a first minor component with respect to the total composition; and 0.2-0.3 wt% of TiO_2 as a second minor component with respect to the total composition. According to an embodiment of the present invention, the ceramic composition has high density owing to excellent sintering properties.

Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck

본 발명의 일 실시 형태에 따른 세라믹 조성물은 Al2O3를 주성분으로 하며, 제1 부성분인 SiO2를 전체 조성물에 대하여 6 내지 10중량%로, 제2 부성분인 TiO2를 전체 조성물에 대하여 0.2 내지 0.3중량%로 포함한다.

The present invention relates to a ceramic composition. According to an embodiment of the present invention, the ceramic composition contains: Al_2O_3 as a main component; 6-10 wt% of SiO_2 as a first minor component with respect to the total composition; and 0.2-0.3 wt% of TiO_2 as a second minor component with respect to the total composition. According to an embodiment of the present invention, the ceramic composition has high density owing to excellent sintering properties.

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Titel:

Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck

Weitere Titelangaben:

세라믹 조성물, 정전척 및 정전척의 제조방법

Erscheinungsdatum:

03.07.2023

Medientyp:

Patent

Format:

Elektronische Ressource

Sprache:

Koreanisch

Klassifikation:

IPC: C04B Kalk , LIME / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES

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