Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
MANUFACTURING METHOD FOR ALUMINIYM NITRIDE SUSCEPTOR AND ALUMINIYM NITRIDE SUSCEPTOR MANUFACTURED THEREBY
The present invention relates to a method for manufacturing an aluminum nitride susceptor, which comprises the steps of: forming a first mixed powder by mixing a blackening additive containing calcium oxide (CaO), iron oxide (Fe_2O_3) and silicon oxide (SiO_2) in aluminum nitride powder; forming a second mixed powder by mixing a sintering additive containing yttria (Y_2O_3) and a binder with the first mixed powder; degreasing the second mixed powder through heat treatment at a temperature of 600 to 700℃; and sintering at a temperature of 1,700 to 1,900℃ after loading the degreased second mixed powder into a graphite mold. The present invention relates to a method of manufacturing an aluminum nitride susceptor, which can replace the conventional graphite susceptor by producing a black color by reducing the brightness of the aluminum nitride sintered body without adding a heavy metal compound.
본 발명에 따른 질화알루미늄 서셉터의 제조방법은, 질화알루미늄 분말에, 산화칼슘(CaO), 산화철(Fe2O3) 및 산화규소(SiO2)를 포함하는 흑화첨가물을 혼합하여 제1 혼합분말을 형성하는 단계; 상기 제1차 혼합분말에, 이트리아(Y2O3)를 포함하는 소결첨가제와 바인더를 혼합하여 제2 혼합분말을 형성하는 단계; 상기 제2 혼합분말을 600℃ ~ 700℃ 의 온도에서 열처리를 통해 탈지하는 단계; 탈지된 상기 제2 혼합분말을 그래파이트 몰드에 장입한 후 1,700℃ ~ 1,900℃의 온도에서 소결하는 단계;를 포함하는 것을 특징으로 한다.
MANUFACTURING METHOD FOR ALUMINIYM NITRIDE SUSCEPTOR AND ALUMINIYM NITRIDE SUSCEPTOR MANUFACTURED THEREBY
The present invention relates to a method for manufacturing an aluminum nitride susceptor, which comprises the steps of: forming a first mixed powder by mixing a blackening additive containing calcium oxide (CaO), iron oxide (Fe_2O_3) and silicon oxide (SiO_2) in aluminum nitride powder; forming a second mixed powder by mixing a sintering additive containing yttria (Y_2O_3) and a binder with the first mixed powder; degreasing the second mixed powder through heat treatment at a temperature of 600 to 700℃; and sintering at a temperature of 1,700 to 1,900℃ after loading the degreased second mixed powder into a graphite mold. The present invention relates to a method of manufacturing an aluminum nitride susceptor, which can replace the conventional graphite susceptor by producing a black color by reducing the brightness of the aluminum nitride sintered body without adding a heavy metal compound.
본 발명에 따른 질화알루미늄 서셉터의 제조방법은, 질화알루미늄 분말에, 산화칼슘(CaO), 산화철(Fe2O3) 및 산화규소(SiO2)를 포함하는 흑화첨가물을 혼합하여 제1 혼합분말을 형성하는 단계; 상기 제1차 혼합분말에, 이트리아(Y2O3)를 포함하는 소결첨가제와 바인더를 혼합하여 제2 혼합분말을 형성하는 단계; 상기 제2 혼합분말을 600℃ ~ 700℃ 의 온도에서 열처리를 통해 탈지하는 단계; 탈지된 상기 제2 혼합분말을 그래파이트 몰드에 장입한 후 1,700℃ ~ 1,900℃의 온도에서 소결하는 단계;를 포함하는 것을 특징으로 한다.
MANUFACTURING METHOD FOR ALUMINIYM NITRIDE SUSCEPTOR AND ALUMINIYM NITRIDE SUSCEPTOR MANUFACTURED THEREBY
질화알루미늄 서셉터의 제조방법 및 그에 의해 제조된 질화알루미늄 서셉터
KIM YOUNG MI (Autor:in) / PARK HO JUN (Autor:in) / JEON SEONG HYEON (Autor:in)
21.10.2021
Patent
Elektronische Ressource
Koreanisch
METHOD FOR MANUFACTURING SUSCEPTOR FOR HOLDING WAFER, AND SUSCEPTOR FOR HOLDING WAFER
| Europäisches Patentamt | 2015