Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CERAMIC MATERIAL HAVING HIGH RESISTIVITY AND HIGH CORROSION RESISTANCE AND WAFER PLACEMENT TABLE
The high-resistance and high-corrosion-resistant ceramic material of the present invention contains magnesium-aluminum oxynitride and has a carbon content of 0.005 to 0.275 mass%.
본 발명의 고저항·고내식 세라믹스 재료는, 마그네슘-알루미늄 산질화물을 함유하는 것이고, 탄소 함유율이 0.005 내지 0.275질량％인 것이다.
CERAMIC MATERIAL HAVING HIGH RESISTIVITY AND HIGH CORROSION RESISTANCE AND WAFER PLACEMENT TABLE
The high-resistance and high-corrosion-resistant ceramic material of the present invention contains magnesium-aluminum oxynitride and has a carbon content of 0.005 to 0.275 mass%.
본 발명의 고저항·고내식 세라믹스 재료는, 마그네슘-알루미늄 산질화물을 함유하는 것이고, 탄소 함유율이 0.005 내지 0.275질량％인 것이다.
CERAMIC MATERIAL HAVING HIGH RESISTIVITY AND HIGH CORROSION RESISTANCE AND WAFER PLACEMENT TABLE
고저항·고내식 세라믹스 재료 및 웨이퍼 적재대
HATTORI AKIYOSHI (Autor:in) / UEDA KOJI (Autor:in) / NISHIO HITOSHI (Autor:in) / MIZOGUCHI TOMOHISA (Autor:in)
26.09.2023
Patent
Elektronische Ressource
Koreanisch
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