Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CERAMIC MATERIAL HAVING HIGH RESISTIVITY AND HIGH CORROSION RESISTANCE, AND WAFER PLACEMENT TABLE
A ceramic material that has a high resistivity and high corrosion resistance according to the present invention contains magnesium-aluminum oxynitride and has a carbon content of 0.005 to 0.275 mass %.
CERAMIC MATERIAL HAVING HIGH RESISTIVITY AND HIGH CORROSION RESISTANCE, AND WAFER PLACEMENT TABLE
A ceramic material that has a high resistivity and high corrosion resistance according to the present invention contains magnesium-aluminum oxynitride and has a carbon content of 0.005 to 0.275 mass %.
CERAMIC MATERIAL HAVING HIGH RESISTIVITY AND HIGH CORROSION RESISTANCE, AND WAFER PLACEMENT TABLE
HATTORI AKIYOSHI (Autor:in) / UEDA KOJI (Autor:in) / NISHIO HITOSHI (Autor:in) / MIZOGUCHI TOMOHISA (Autor:in)
21.09.2023
Patent
Elektronische Ressource
Englisch
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