Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
MOLYBDENUM OXIDE SINTERED BODY SPUTTERING TARGET AND OXIDE THIN FILM
본 발명은 몰리브덴 산화물을 주(主)성분으로 하는 산화물 소결체, 상기 소결체를 포함하는 스퍼터링 타겟 및 이로부터 형성된 산화물 박막을 제공한다. 본 발명에서는 난(難)소결성 몰리브덴 산화물과 니오븀 산화물에 특정 금속산화물을 소정 함량 범위로 첨가함으로써, 무가압 소결을 실시하더라도 소결성 개선, 고밀도 특성, 및 입자 성장 제어를 통한 박막의 균일성을 동시에 확보할 수 있다.
The present invention provides: an oxide sintered body comprising a molybdenum oxide as the main component; a sputtering target comprising the sintered body; and an oxide thin film formed therefrom. According to the present invention, by adding a specific metal oxide in an amount in a predetermined range to sinter-resistant molybdenum oxide and niobium oxide, it is possible to simultaneously achieve improved sinterability, high-density characteristics, and thin film uniformity, which is achieved through particle growth control, even when performing non-pressurized sintering.
MOLYBDENUM OXIDE SINTERED BODY SPUTTERING TARGET AND OXIDE THIN FILM
본 발명은 몰리브덴 산화물을 주(主)성분으로 하는 산화물 소결체, 상기 소결체를 포함하는 스퍼터링 타겟 및 이로부터 형성된 산화물 박막을 제공한다. 본 발명에서는 난(難)소결성 몰리브덴 산화물과 니오븀 산화물에 특정 금속산화물을 소정 함량 범위로 첨가함으로써, 무가압 소결을 실시하더라도 소결성 개선, 고밀도 특성, 및 입자 성장 제어를 통한 박막의 균일성을 동시에 확보할 수 있다.
The present invention provides: an oxide sintered body comprising a molybdenum oxide as the main component; a sputtering target comprising the sintered body; and an oxide thin film formed therefrom. According to the present invention, by adding a specific metal oxide in an amount in a predetermined range to sinter-resistant molybdenum oxide and niobium oxide, it is possible to simultaneously achieve improved sinterability, high-density characteristics, and thin film uniformity, which is achieved through particle growth control, even when performing non-pressurized sintering.
MOLYBDENUM OXIDE SINTERED BODY SPUTTERING TARGET AND OXIDE THIN FILM
몰리브덴 산화물 소결체, 스퍼터링 타겟 및 산화물 박막
HWANG BYUNGJIN (Autor:in) / PARK JAESOUNG (Autor:in) / LEE HYOWON (Autor:in) / LEE SEUNGYI (Autor:in) / PARK SANGYONG (Autor:in) / JANG BONGJUNG (Autor:in) / YUN EUNSUB (Autor:in) / JIN SEUNGHYEON (Autor:in) / YANG SEUNGHO (Autor:in)
22.10.2024
Patent
Elektronische Ressource
Koreanisch
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