Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
MgAI2O4 sintered body, sputtering target using the sintered body and method of producing MgAI2O4 sintered body
Provided is a MgAl2O4 sintered body, which includes a relative density of the MgAl2O4 sintered body being 90% or higher, and an L* value in a L*a*b* color system being 90 or more. A method of producing a MgAl2O4 sintered body is characterized by that a MgAl2O4 powder is hot pressed at 1150 to 1300° C., and is thereafter subjected to atmospheric sintering at 1350° C. or higher. Embodiments of the present invention address the issue of providing a high density and white MgAl2O4 sintered body and a sputtering target using the sintered body, and a method of producing a MgAl2O4 sintered body.
MgAI2O4 sintered body, sputtering target using the sintered body and method of producing MgAI2O4 sintered body
Provided is a MgAl2O4 sintered body, which includes a relative density of the MgAl2O4 sintered body being 90% or higher, and an L* value in a L*a*b* color system being 90 or more. A method of producing a MgAl2O4 sintered body is characterized by that a MgAl2O4 powder is hot pressed at 1150 to 1300° C., and is thereafter subjected to atmospheric sintering at 1350° C. or higher. Embodiments of the present invention address the issue of providing a high density and white MgAl2O4 sintered body and a sputtering target using the sintered body, and a method of producing a MgAl2O4 sintered body.
MgAI2O4 sintered body, sputtering target using the sintered body and method of producing MgAI2O4 sintered body
NARITA SATOYASU (Autor:in)
25.10.2022
Patent
Elektronische Ressource
Englisch
Europäisches Patentamt | 2019
|Europäisches Patentamt | 2021
|METHOD FOR PRODUCING VO2 SINTERED BODY AND VO2 SINTERED BODY SPUTTERING TARGET
Europäisches Patentamt | 2021
|Europäisches Patentamt | 2017
SINTERED BODY, SPUTTERING TARGET, AND MANUFACTURING METHOD OF SINTERED BODY
Europäisches Patentamt | 2020
|