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MgAI2O4 sintered body, sputtering target using the sintered body and method of producing MgAI2O4 sintered body
Provided is a MgAl2O4 sintered body, which includes a relative density of the MgAl2O4 sintered body being 90% or higher, and an L* value in a L*a*b* color system being 90 or more. A method of producing a MgAl2O4 sintered body is characterized by that a MgAl2O4 powder is hot pressed at 1150 to 1300° C., and is thereafter subjected to atmospheric sintering at 1350° C. or higher. Embodiments of the present invention address the issue of providing a high density and white MgAl2O4 sintered body and a sputtering target using the sintered body, and a method of producing a MgAl2O4 sintered body.
MgAI2O4 sintered body, sputtering target using the sintered body and method of producing MgAI2O4 sintered body
Provided is a MgAl2O4 sintered body, which includes a relative density of the MgAl2O4 sintered body being 90% or higher, and an L* value in a L*a*b* color system being 90 or more. A method of producing a MgAl2O4 sintered body is characterized by that a MgAl2O4 powder is hot pressed at 1150 to 1300° C., and is thereafter subjected to atmospheric sintering at 1350° C. or higher. Embodiments of the present invention address the issue of providing a high density and white MgAl2O4 sintered body and a sputtering target using the sintered body, and a method of producing a MgAl2O4 sintered body.
MgAI2O4 sintered body, sputtering target using the sintered body and method of producing MgAI2O4 sintered body
NARITA SATOYASU (author)
2022-10-25
Patent
Electronic Resource
English
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