A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Composite sintered body, electrostatic chuck member, and electrostatic chuck device
This composite sintered body is a ceramic composite sintered body which includes aluminum oxide which is a main phase, and silicon carbide which is a sub-phase, the composite sintered body including an interface layer which includes, as a forming material, a material other than the aluminum oxide and the silicon carbide, at an interface between a crystal grain of the aluminum oxide and a crystal grain of the silicon carbide in a grain boundary.
Composite sintered body, electrostatic chuck member, and electrostatic chuck device
This composite sintered body is a ceramic composite sintered body which includes aluminum oxide which is a main phase, and silicon carbide which is a sub-phase, the composite sintered body including an interface layer which includes, as a forming material, a material other than the aluminum oxide and the silicon carbide, at an interface between a crystal grain of the aluminum oxide and a crystal grain of the silicon carbide in a grain boundary.
Composite sintered body, electrostatic chuck member, and electrostatic chuck device
HIDAKA NOBUHIRO (author) / KUGIMOTO HIRONORI (author)
2023-12-12
Patent
Electronic Resource
English
COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, AND ELECTROSTATIC CHUCK DEVICE
| European Patent Office | 2019
Composite sintered body, electrostatic chuck member, and electrostatic chuck device
| European Patent Office | 2023
COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, AND ELECTROSTATIC CHUCK DEVICE
| European Patent Office | 2020
COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, AND ELECTROSTATIC CHUCK DEVICE
| European Patent Office | 2019
COMPOSITE SINTERED BODY, ELECTROSTATIC CHUCK MEMBER, AND ELECTROSTATIC CHUCK DEVICE
| European Patent Office | 2018