Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Provided is an alumina ceramic with a low secondary electron emission coefficient and suitable for components of a high frequency generator, a plasma generator and so on. The alumina ceramic contains alumina as a main component, and at least two kinds of elements selected from an alkaline earth metal and from an element belonging to period 3, 4 or 5. The alkaline earth metal and the element belonging to period 3, 4 or 5 have a higher first ionization energy than aluminum. An electronegativity difference between the alkaline earth metal and the element belonging to period 3, 4 or 5 is 0 or more and 0.6 or less. A ratio (x/y) of the grain boundary area (x) to the grain area (y) in the alumina ceramic is 0.0001 to 0.001.
Provided is an alumina ceramic with a low secondary electron emission coefficient and suitable for components of a high frequency generator, a plasma generator and so on. The alumina ceramic contains alumina as a main component, and at least two kinds of elements selected from an alkaline earth metal and from an element belonging to period 3, 4 or 5. The alkaline earth metal and the element belonging to period 3, 4 or 5 have a higher first ionization energy than aluminum. An electronegativity difference between the alkaline earth metal and the element belonging to period 3, 4 or 5 is 0 or more and 0.6 or less. A ratio (x/y) of the grain boundary area (x) to the grain area (y) in the alumina ceramic is 0.0001 to 0.001.
Alumina ceramic
FUKASAWA YUJI (Autor:in)
20.02.2024
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
ALUMINA CERAMIC AND MANUFACTURING METHOD OF ALUMINA CERAMIC
| Europäisches Patentamt | 2023