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    Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for manufacturing composite sintered body

    Neue Suche nach: HIDAKA NOBUHIRO
    Neue Suche nach: OOTOMO MEGUMI
    Neue Suche nach: ARIKAWA JUN

    A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 μm2 at a magnification of 1000 times is 5 μm or lower.

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    Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for manufacturing composite sintered body

    Neue Suche nach: HIDAKA NOBUHIRO
    Neue Suche nach: OOTOMO MEGUMI
    Neue Suche nach: ARIKAWA JUN

    A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 μm2 at a magnification of 1000 times is 5 μm or lower.

    Zugriff

    Download

    Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for manufacturing composite sintered body

    Neue Suche nach: HIDAKA NOBUHIRO
    Neue Suche nach: OOTOMO MEGUMI
    Neue Suche nach: ARIKAWA JUN

    A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 μm2 at a magnification of 1000 times is 5 μm or lower.

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    Zugriff

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    Ähnliche Titel

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    Titel:

    Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for manufacturing composite sintered body

    Beteiligte:

    HIDAKA NOBUHIRO (Autor:in) / OOTOMO MEGUMI (Autor:in) / ARIKAWA JUN (Autor:in)

    Erscheinungsdatum:

    21.05.2024

    Medientyp:

    Patent

    Format:

    Elektronische Ressource

    Sprache:

    Englisch

    Klassifikation:

    IPC:  H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / C04B Kalk , LIME / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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