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    Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for manufacturing composite sintered body

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    A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 μm2 at a magnification of 1000 times is 5 μm or lower.

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    Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for manufacturing composite sintered body

    New search for: HIDAKA NOBUHIRO
    New search for: OOTOMO MEGUMI
    New search for: ARIKAWA JUN

    A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 μm2 at a magnification of 1000 times is 5 μm or lower.

    Access

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    Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for manufacturing composite sintered body

    New search for: HIDAKA NOBUHIRO
    New search for: OOTOMO MEGUMI
    New search for: ARIKAWA JUN

    A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 μm2 at a magnification of 1000 times is 5 μm or lower.

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    Document information
    Title:

    Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for manufacturing composite sintered body

    Contributors:

    HIDAKA NOBUHIRO (author) / OOTOMO MEGUMI (author) / ARIKAWA JUN (author)

    Publication date:

    2024-05-21

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / C04B Kalk , LIME / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

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