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Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
High density corrosion resistant layer arrangement for electrostatic chucks
A layer arrangement for an electrostatic chuck comprises a first ceramic layer; a second ceramic layer; a metallised layered disposed between the first and second ceramic layers. The first ceramic layer comprises at least 90.0 wt % alumina, titania, ZrO2, Y2O3, AlN, Si3N4, SiC, transition metal oxides or combinations thereof; and in the range of 0.1 to 10.0 wt % tantalum oxide (Ta2O5).
High density corrosion resistant layer arrangement for electrostatic chucks
A layer arrangement for an electrostatic chuck comprises a first ceramic layer; a second ceramic layer; a metallised layered disposed between the first and second ceramic layers. The first ceramic layer comprises at least 90.0 wt % alumina, titania, ZrO2, Y2O3, AlN, Si3N4, SiC, transition metal oxides or combinations thereof; and in the range of 0.1 to 10.0 wt % tantalum oxide (Ta2O5).
High density corrosion resistant layer arrangement for electrostatic chucks
LEE CHENGTSIN (Autor:in)
22.10.2024
Patent
Elektronische Ressource
Englisch
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