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High Density Corrosion Resistant Layer Arrangement For Electrostatic Chucks
A layer arrangement for an electrostatic chuck comprises a first ceramic layer; a second ceramic layer; a metallised layered disposed between the first and second ceramic layers. The first ceramic layer comprises at least 90.0 wt % 5 alumina, titania, ZrO2, Y2O3, AlN, Si3N4, SiC, transition metal oxides or combinations thereof; and in the range of 0.1 to 10.0 wt % tantalum oxide (Ta2O5).
High Density Corrosion Resistant Layer Arrangement For Electrostatic Chucks
A layer arrangement for an electrostatic chuck comprises a first ceramic layer; a second ceramic layer; a metallised layered disposed between the first and second ceramic layers. The first ceramic layer comprises at least 90.0 wt % 5 alumina, titania, ZrO2, Y2O3, AlN, Si3N4, SiC, transition metal oxides or combinations thereof; and in the range of 0.1 to 10.0 wt % tantalum oxide (Ta2O5).
High Density Corrosion Resistant Layer Arrangement For Electrostatic Chucks
LEE CHENGTSIN (Autor:in)
23.06.2022
Patent
Elektronische Ressource
Englisch
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