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CORDIERITE-BASED SINTERED BODY, METHOD FOR PRODUCING THE SAME, AND COMPOSITE SUBSTRATE
A cordierite-based sintered body according to the present invention contains cordierite as a main component and silicon nitride or silicon carbide. The cordierite-based sintered body preferably has a thermal expansion coefficient less than 2.4 ppm; ° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1 μm or less.
CORDIERITE-BASED SINTERED BODY, METHOD FOR PRODUCING THE SAME, AND COMPOSITE SUBSTRATE
A cordierite-based sintered body according to the present invention contains cordierite as a main component and silicon nitride or silicon carbide. The cordierite-based sintered body preferably has a thermal expansion coefficient less than 2.4 ppm; ° C. at 40° C. to 400° C., an open porosity of 0.5% or less, and an average grain size of 1 μm or less.
CORDIERITE-BASED SINTERED BODY, METHOD FOR PRODUCING THE SAME, AND COMPOSITE SUBSTRATE
ISODA YOSHINORI (author) / SUZUKI YOSHIO (author) / INOUE KATSUHIRO (author) / KATSUDA YUJI (author)
2017-09-28
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
Cordierite-based sintered body, method for producing the same, and composite substrate
European Patent Office | 2021
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