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METAL OXIDE THIN FILM, METHOD FOR DEPOSITING METAL OXIDE THIN FILM AND DEVICE COMPRISING METAL OXIDE THIN FILM
A metal oxide thin film formed of β-MoO3 includes at least one doping element of the group Re, Mn, and Ru. Further, there is described a method of producing such a metal oxide thin film via sputtering and a thin film device with a metal oxide thin film of β-MoO3 that includes at least one doping element selected from the group Re, Mn, and Ru.
METAL OXIDE THIN FILM, METHOD FOR DEPOSITING METAL OXIDE THIN FILM AND DEVICE COMPRISING METAL OXIDE THIN FILM
A metal oxide thin film formed of β-MoO3 includes at least one doping element of the group Re, Mn, and Ru. Further, there is described a method of producing such a metal oxide thin film via sputtering and a thin film device with a metal oxide thin film of β-MoO3 that includes at least one doping element selected from the group Re, Mn, and Ru.
METAL OXIDE THIN FILM, METHOD FOR DEPOSITING METAL OXIDE THIN FILM AND DEVICE COMPRISING METAL OXIDE THIN FILM
HITOSUGI TARO (Autor:in)
02.11.2017
Patent
Elektronische Ressource
Englisch
IPC:
H01B
CABLES
,
Kabel
/
C23C
Beschichten metallischer Werkstoffe
,
COATING METALLIC MATERIAL
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E06B
Feste oder bewegliche Abschlüsse für Öffnungen in Bauwerken, Fahrzeugen, Zäunen oder ähnlichen Einfriedungen allgemein, z.B. Türen, Fenster, Läden, Tore
,
FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES, OR LIKE ENCLOSURES, IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
/
G02F
DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING,...
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Vorrichtungen oder Anordnungen, deren optische Arbeitsweise durch Änderung der optischen Eigenschaften des Mediums der Vorrichtungen oder Anordnungen geändert wird zum Steuern der Intensität, Farbe, Phase, Polarisation oder der Richtung von...
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