Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CERAMIC MATERIAL AND ELECTROSTATIC CHUCK DEVICE
Provided is a composite sintered body for an electrostatic chuck, which is not easily broken even if it is exposed to high-power plasma. Further, provided are an electrostatic chuck device using such a composite sintered body for an electrostatic chuck and a method of manufacturing a composite sintered body for an electrostatic chuck. The composite sintered body for an electrostatic chuck is a composite sintered body including an insulating ceramic and silicon carbide, in which crystal grains of the silicon carbide are dispersed in at least one selected from the group consisting of a crystal grain boundary and a crystal grain of a main phase formed by sintering crystal grains of the insulating ceramic.
CERAMIC MATERIAL AND ELECTROSTATIC CHUCK DEVICE
Provided is a composite sintered body for an electrostatic chuck, which is not easily broken even if it is exposed to high-power plasma. Further, provided are an electrostatic chuck device using such a composite sintered body for an electrostatic chuck and a method of manufacturing a composite sintered body for an electrostatic chuck. The composite sintered body for an electrostatic chuck is a composite sintered body including an insulating ceramic and silicon carbide, in which crystal grains of the silicon carbide are dispersed in at least one selected from the group consisting of a crystal grain boundary and a crystal grain of a main phase formed by sintering crystal grains of the insulating ceramic.
CERAMIC MATERIAL AND ELECTROSTATIC CHUCK DEVICE
YOSHIOKA YOSHIKI (Autor:in) / HIDAKA NOBUHIRO (Autor:in) / KUGIMOTO HIRONORI (Autor:in)
07.02.2019
Patent
Elektronische Ressource
Englisch
Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck
Europäisches Patentamt | 2023
Ceramic Composition Electrostatic Chuck and Manufacturing Method of Electrostatic Chuck
| Europäisches Patentamt | 2017