A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING APPARATUS AND DISPLAY MANUFACTURING APPARATUS PROVIDED WITH COMPOSITE STRUCTURE
Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structure includes a polycrystalline ceramic and the composite structure has luminance Sa satisfying a specific value calculated from a TEM image analysis thereof, can be suitably used as an inner member of a semiconductor manufacturing apparatus required to have a low-particle generation.
COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING APPARATUS AND DISPLAY MANUFACTURING APPARATUS PROVIDED WITH COMPOSITE STRUCTURE
Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structure includes a polycrystalline ceramic and the composite structure has luminance Sa satisfying a specific value calculated from a TEM image analysis thereof, can be suitably used as an inner member of a semiconductor manufacturing apparatus required to have a low-particle generation.
COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING APPARATUS AND DISPLAY MANUFACTURING APPARATUS PROVIDED WITH COMPOSITE STRUCTURE
IWASAWA JUNICHI (author) / ASHIZAWA HIROAKI (author) / WADA TAKUMA (author) / TAKIZAWA RYOTO (author) / AOSHIMA TOSHIHIRO (author) / TAKAHASHI YUUKI (author) / KINJO ATSUSHI (author)
2019-09-12
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
/
C01B
NON-METALLIC ELEMENTS
,
Nichtmetallische Elemente
/
C01F
COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
,
Verbindungen der Metalle Beryllium, Magnesium, Aluminium, Calcium, Strontium, Barium, Radium, Thorium oder der Seltenen Erden
/
C01G
Verbindungen der von den Unterklassen C01D oder C01F nicht umfassten Metalle
,
COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSES C01D OR C01F
/
G01N
Untersuchen oder Analysieren von Stoffen durch Bestimmen ihrer chemischen oder physikalischen Eigenschaften
,
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
/
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
/
H01L
Halbleiterbauelemente
,
SEMICONDUCTOR DEVICES
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