Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
SEMICONDUCTIVE CERAMIC MEMBER AND HOLDER FOR WAFER CONVEYANCE
A semiconductive ceramic member includes alumina ceramics containing α-alumina and titanium oxide. The alumina ceramics contains a content of 89-95% by mass of Al in terms of Al2O3, and a content of 5-11% by mass of Ti in terms of TiO2. When a total content of Al in terms of Al2O3 and Ti in terms of TiO2 is taken as 100 parts by mass, the alumina ceramics contains a content of 0.02-0.6 part by mass in total of Ca in terms of CaO and Ce in terms of CeO2 relative to the 100 parts by mass. The member has a bulk density of 3.7 g/cm3 or more and a peak of TiOx (0
SEMICONDUCTIVE CERAMIC MEMBER AND HOLDER FOR WAFER CONVEYANCE
A semiconductive ceramic member includes alumina ceramics containing α-alumina and titanium oxide. The alumina ceramics contains a content of 89-95% by mass of Al in terms of Al2O3, and a content of 5-11% by mass of Ti in terms of TiO2. When a total content of Al in terms of Al2O3 and Ti in terms of TiO2 is taken as 100 parts by mass, the alumina ceramics contains a content of 0.02-0.6 part by mass in total of Ca in terms of CaO and Ce in terms of CeO2 relative to the 100 parts by mass. The member has a bulk density of 3.7 g/cm3 or more and a peak of TiOx (0
SEMICONDUCTIVE CERAMIC MEMBER AND HOLDER FOR WAFER CONVEYANCE
TATEYAMA YASUHARU (Autor:in) / KOHSAKA SHOJI (Autor:in)
26.12.2019
Patent
Elektronische Ressource
Englisch
SEMICONDUCTIVE CERAMIC MEMBER AND HOLDER FOR WAFER CONVEYANCE
| Europäisches Patentamt | 2018
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