Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
SEMICONDUCTIVE CERAMIC MEMBER
A semiconductive ceramic member according to the present disclosure contains a plurality of aluminum oxide crystal grains, and a plurality of titanium oxide crystal grains. The total content of aluminum oxide and titanium oxide is 99% by mass or more per 100% by mass of all constituents. The content of the aluminum oxide is 86% by mass or more and 96% by mass or less and the content of the titanium oxide is 4% by mass or more and 14% by mass or less per 100% by mass of the aluminum oxide and the titanium oxide in total. A peak of TiOx (0
SEMICONDUCTIVE CERAMIC MEMBER
A semiconductive ceramic member according to the present disclosure contains a plurality of aluminum oxide crystal grains, and a plurality of titanium oxide crystal grains. The total content of aluminum oxide and titanium oxide is 99% by mass or more per 100% by mass of all constituents. The content of the aluminum oxide is 86% by mass or more and 96% by mass or less and the content of the titanium oxide is 4% by mass or more and 14% by mass or less per 100% by mass of the aluminum oxide and the titanium oxide in total. A peak of TiOx (0
SEMICONDUCTIVE CERAMIC MEMBER
TATEYAMA YASUHARU (Autor:in) / HIRANO YOSHINORI (Autor:in) / FUJITA NAOYA (Autor:in) / TSUJITAKE SENRI (Autor:in) / KOHSAKA SHOJI (Autor:in)
20.01.2022
Patent
Elektronische Ressource
Englisch
SEMICONDUCTIVE CERAMIC MEMBER AND HOLDER FOR WAFER CONVEYANCE
| Europäisches Patentamt | 2019
SEMICONDUCTIVE CERAMIC MEMBER AND HOLDER FOR WAFER CONVEYANCE
| Europäisches Patentamt | 2018