Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
MAGNESIUM OXIDE SPUTTERING TARGET AND METHOD OF MAKING SAME
A sintered compact magnesium oxide target for sputtering having a purity of 99.99 wt % or higher, a density of 3.58 g/cm3 or higher, and a transparency 10% or more. A sintered compact magnesium oxide target for sputtering having a purity of 99.99 wt % or higher, a density of 3.58 g/cm3 or higher, and an average crystal grain size of 50 μm or more.
MAGNESIUM OXIDE SPUTTERING TARGET AND METHOD OF MAKING SAME
A sintered compact magnesium oxide target for sputtering having a purity of 99.99 wt % or higher, a density of 3.58 g/cm3 or higher, and a transparency 10% or more. A sintered compact magnesium oxide target for sputtering having a purity of 99.99 wt % or higher, a density of 3.58 g/cm3 or higher, and an average crystal grain size of 50 μm or more.
MAGNESIUM OXIDE SPUTTERING TARGET AND METHOD OF MAKING SAME
IVANOV EUGENE Y (Autor:in) / JAWORSKI CHRISTOPHER M (Autor:in)
09.01.2020
Patent
Elektronische Ressource
Englisch
MAGNESIUM OXIDE SPUTTERING TARGET AND METHOD OF MAKING SAME
| Europäisches Patentamt | 2018