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METHOD FOR PRODUCING LAYERS OF SILICON CARBIDE
The invention relates to a method for producing thin layers of silicon carbide by means of a solution or dispersion containing carbon and silicon.
METHOD FOR PRODUCING LAYERS OF SILICON CARBIDE
The invention relates to a method for producing thin layers of silicon carbide by means of a solution or dispersion containing carbon and silicon.
METHOD FOR PRODUCING LAYERS OF SILICON CARBIDE
GREULICH-WEBER SIEGMUND (Autor:in) / SCHLEICHER-TAPPESER RÜDIGER (Autor:in)
28.05.2020
Patent
Elektronische Ressource
Englisch