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METHOD FOR PRODUCING LAYERS OF SILICON CARBIDE
The invention relates to a method for producing thin layers of silicon carbide by means of a solution or dispersion containing carbon and silicon.
METHOD FOR PRODUCING LAYERS OF SILICON CARBIDE
The invention relates to a method for producing thin layers of silicon carbide by means of a solution or dispersion containing carbon and silicon.
METHOD FOR PRODUCING LAYERS OF SILICON CARBIDE
GREULICH-WEBER SIEGMUND (author) / SCHLEICHER-TAPPESER RÜDIGER (author)
2020-05-28
Patent
Electronic Resource
English