A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CERAMIC, PROBE GUIDING MEMBER, PROBE CARD, AND SOCKET FOR PACKAGE INSPECTION
A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2 and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at −50 to 500° C. of 1.0×10−6 to 5.0×10−6/° C., is excellent in low electrostatic properties (106 to 1014 Ω·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.
CERAMIC, PROBE GUIDING MEMBER, PROBE CARD, AND SOCKET FOR PACKAGE INSPECTION
A ceramic according to the present invention includes, in mass %, BN: 20.0 to 55.0%, SiC: 5.0 to 40.0%, ZrO2 and/or Si3N4: 3.0 to 60.0%. The ceramic has a coefficient of thermal expansion at −50 to 500° C. of 1.0×10−6 to 5.0×10−6/° C., is excellent in low electrostatic properties (106 to 1014 Ω·cm in volume resistivity) and free-machining properties, and is thus suitable to be used for, for example, a probe guiding member for guiding probes of a probe card, and a socket for package inspection.
CERAMIC, PROBE GUIDING MEMBER, PROBE CARD, AND SOCKET FOR PACKAGE INSPECTION
YAMAGISHI WATARU (author) / MORI KAZUMASA (author) / ETO SHUNICHI (author)
2020-07-30
Patent
Electronic Resource
English
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