Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
YTTRIUM OXIDE BASED COATING COMPOSITION
Described herein is a protective coating composition that provides erosion and corrosion resistance to a coated article (such as a chamber component) upon the article's exposure to harsh chemical environment (such as hydrogen based and/or halogen based environment) and/or upon the article's exposure to high energy plasma. Also described herein is a method of coating an article with the protective coating using electronic beam ion assisted deposition, physical vapor deposition, or plasma spray. Also described herein is a method of processing wafer, which method exhibits, on average, less than about 5 yttrium based particle defects per wafer.
YTTRIUM OXIDE BASED COATING COMPOSITION
Described herein is a protective coating composition that provides erosion and corrosion resistance to a coated article (such as a chamber component) upon the article's exposure to harsh chemical environment (such as hydrogen based and/or halogen based environment) and/or upon the article's exposure to high energy plasma. Also described herein is a method of coating an article with the protective coating using electronic beam ion assisted deposition, physical vapor deposition, or plasma spray. Also described herein is a method of processing wafer, which method exhibits, on average, less than about 5 yttrium based particle defects per wafer.
YTTRIUM OXIDE BASED COATING COMPOSITION
FIROUZDOR VAHID (Autor:in) / BEAUDRY CHRISTOPHER LAURENT (Autor:in) / DOH HYUN-HO (Autor:in) / BEHNKE JOSEPH FREDERICK (Autor:in) / SOMMERS JOSEPH FREDERICK (Autor:in)
14.10.2021
Patent
Elektronische Ressource
Englisch
| Europäisches Patentamt | 2021