Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CONTROLLED POROSITY YTTRIUM OXIDE FOR ETCH APPLICATIONS
A sintered yttrium oxide body having a total impurity level of 40 ppm or less, a density of not less than 4.93 g/cm3, wherein the sintered yttrium oxide body has at least one surface comprising at least one pore, wherein no pore is larger than 5 μm in diameter. A process for making the sintered yttrium oxide body is also disclosed.
CONTROLLED POROSITY YTTRIUM OXIDE FOR ETCH APPLICATIONS
A sintered yttrium oxide body having a total impurity level of 40 ppm or less, a density of not less than 4.93 g/cm3, wherein the sintered yttrium oxide body has at least one surface comprising at least one pore, wherein no pore is larger than 5 μm in diameter. A process for making the sintered yttrium oxide body is also disclosed.
CONTROLLED POROSITY YTTRIUM OXIDE FOR ETCH APPLICATIONS
DONELON MATTHEW JOSEPH (Autor:in) / BISTA SAURAV (Autor:in) / WAGHMARE SAURABH (Autor:in) / DAVIS CHASE (Autor:in) / WEISSMAYER MICHAEL (Autor:in) / FRANZ FELIX (Autor:in)
30.06.2022
Patent
Elektronische Ressource
Englisch
IPC:
C04B
Kalk
,
LIME
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