A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
CONTROLLED POROSITY YTTRIUM OXIDE FOR ETCH APPLICATIONS
A sintered yttrium oxide body having a total impurity level of 40 ppm or less, a density of not less than 4.93 g/cm3, wherein the sintered yttrium oxide body has at least one surface comprising at least one pore, wherein no pore is larger than 5 μm in diameter. A process for making the sintered yttrium oxide body is also disclosed.
CONTROLLED POROSITY YTTRIUM OXIDE FOR ETCH APPLICATIONS
A sintered yttrium oxide body having a total impurity level of 40 ppm or less, a density of not less than 4.93 g/cm3, wherein the sintered yttrium oxide body has at least one surface comprising at least one pore, wherein no pore is larger than 5 μm in diameter. A process for making the sintered yttrium oxide body is also disclosed.
CONTROLLED POROSITY YTTRIUM OXIDE FOR ETCH APPLICATIONS
DONELON MATTHEW JOSEPH (author) / BISTA SAURAV (author) / WAGHMARE SAURABH (author) / DAVIS CHASE (author) / WEISSMAYER MICHAEL (author) / FRANZ FELIX (author)
2022-06-30
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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