Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
PART FOR PLASMA PROCESSING APPARATUS, MANUFACTURING METHOD THEREOF, AND PLASMA PROCESSING APPARATUS
A member for a plasma processing apparatus configured of a tubular body composed of a ceramic having a rare earth element oxide, aluminum oxide, or a rare earth element aluminum composite oxide as a main constituent and including a through hole in an axial direction, in which a number of recessed portions having a depth of from 10 μm to 20 μm, the depth starting from a ridge located between an inner peripheral surface of the tubular body and a target observation surface obtained by polishing from an outer peripheral surface of the tubular body toward an axis, is 2 or less per 1 mm of the ridge.
PART FOR PLASMA PROCESSING APPARATUS, MANUFACTURING METHOD THEREOF, AND PLASMA PROCESSING APPARATUS
A member for a plasma processing apparatus configured of a tubular body composed of a ceramic having a rare earth element oxide, aluminum oxide, or a rare earth element aluminum composite oxide as a main constituent and including a through hole in an axial direction, in which a number of recessed portions having a depth of from 10 μm to 20 μm, the depth starting from a ridge located between an inner peripheral surface of the tubular body and a target observation surface obtained by polishing from an outer peripheral surface of the tubular body toward an axis, is 2 or less per 1 mm of the ridge.
PART FOR PLASMA PROCESSING APPARATUS, MANUFACTURING METHOD THEREOF, AND PLASMA PROCESSING APPARATUS
TANAKA MANPEI (Autor:in)
27.10.2022
Patent
Elektronische Ressource
Englisch
IPC:
H01J
Elektrische Entladungsröhren oder Entladungslampen
,
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
/
B28B
Formgeben von Ton oder anderen keramischen Stoffzusammensetzungen, Schlacke oder von Mischungen, die zementartiges Material enthalten, z.B. Putzmörtel
,
SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG OR MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
/
C01F
COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
,
Verbindungen der Metalle Beryllium, Magnesium, Aluminium, Calcium, Strontium, Barium, Radium, Thorium oder der Seltenen Erden
/
C04B
Kalk
,
LIME
PART FOR PLASMA PROCESSING APPARATUS, MANUFACTURING METHOD THEREOF, AND PLASMA PROCESSING APPARATUS
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