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    PLASMA RESISTANT MEMBER, PLASMA TREATMENT DEVICE COMPONENT, AND PLASMA TREATMENT DEVICE

    Neue Suche nach: YAMASHIRO MAMORU
    Neue Suche nach: KUBO YOSHINORI
    Neue Suche nach: YUKIHIRO KEIJI

    The present disclosure relates to a plasma resistant member in which a surface exposed to plasma is formed from a single crystal yttrium⋅aluminum⋅garnet (YAG) having a {100} plane, and a plasma treatment device component and a plasma treatment device using the plasma resistant member. When there are a plurality of surfaces exposed to plasma, at least a surface required to have the highest plasma resistance is formed from the single crystal YAG having a {100} plane.

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    PLASMA RESISTANT MEMBER, PLASMA TREATMENT DEVICE COMPONENT, AND PLASMA TREATMENT DEVICE

    Neue Suche nach: YAMASHIRO MAMORU
    Neue Suche nach: KUBO YOSHINORI
    Neue Suche nach: YUKIHIRO KEIJI

    The present disclosure relates to a plasma resistant member in which a surface exposed to plasma is formed from a single crystal yttrium⋅aluminum⋅garnet (YAG) having a {100} plane, and a plasma treatment device component and a plasma treatment device using the plasma resistant member. When there are a plurality of surfaces exposed to plasma, at least a surface required to have the highest plasma resistance is formed from the single crystal YAG having a {100} plane.

    Zugriff

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    PLASMA RESISTANT MEMBER, PLASMA TREATMENT DEVICE COMPONENT, AND PLASMA TREATMENT DEVICE

    Neue Suche nach: YAMASHIRO MAMORU
    Neue Suche nach: KUBO YOSHINORI
    Neue Suche nach: YUKIHIRO KEIJI

    The present disclosure relates to a plasma resistant member in which a surface exposed to plasma is formed from a single crystal yttrium⋅aluminum⋅garnet (YAG) having a {100} plane, and a plasma treatment device component and a plasma treatment device using the plasma resistant member. When there are a plurality of surfaces exposed to plasma, at least a surface required to have the highest plasma resistance is formed from the single crystal YAG having a {100} plane.

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    Titel:

    PLASMA RESISTANT MEMBER, PLASMA TREATMENT DEVICE COMPONENT, AND PLASMA TREATMENT DEVICE

    Beteiligte:

    YAMASHIRO MAMORU (Autor:in) / KUBO YOSHINORI (Autor:in) / YUKIHIRO KEIJI (Autor:in)

    Erscheinungsdatum:

    19.01.2023

    Medientyp:

    Patent

    Format:

    Elektronische Ressource

    Sprache:

    Englisch

    Klassifikation:

    IPC:  H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / C04B Kalk , LIME

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