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    CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    Neue Suche nach: HIDAKA NOBUHIRO
    Neue Suche nach: MIURA YUKIO
    Neue Suche nach: ARIKAWA JUN
    Neue Suche nach: KUGIMOTO HIRONORI

    A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3); and a pair of intermediate layers (6, 7) that are interposed between the pair of ceramic plates (2, 3) and the conductive layer (4) and are in contact with the pair of ceramic plates (2, 3) and the conductive layer (4).

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    CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    Neue Suche nach: HIDAKA NOBUHIRO
    Neue Suche nach: MIURA YUKIO
    Neue Suche nach: ARIKAWA JUN
    Neue Suche nach: KUGIMOTO HIRONORI

    A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3); and a pair of intermediate layers (6, 7) that are interposed between the pair of ceramic plates (2, 3) and the conductive layer (4) and are in contact with the pair of ceramic plates (2, 3) and the conductive layer (4).

    Zugriff

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    CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    Neue Suche nach: HIDAKA NOBUHIRO
    Neue Suche nach: MIURA YUKIO
    Neue Suche nach: ARIKAWA JUN
    Neue Suche nach: KUGIMOTO HIRONORI

    A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3); and a pair of intermediate layers (6, 7) that are interposed between the pair of ceramic plates (2, 3) and the conductive layer (4) and are in contact with the pair of ceramic plates (2, 3) and the conductive layer (4).

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    Titel:

    CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    Beteiligte:

    HIDAKA NOBUHIRO (Autor:in) / MIURA YUKIO (Autor:in) / ARIKAWA JUN (Autor:in) / KUGIMOTO HIRONORI (Autor:in)

    Erscheinungsdatum:

    09.02.2023

    Medientyp:

    Patent

    Format:

    Elektronische Ressource

    Sprache:

    Englisch

    Klassifikation:

    IPC:  H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / C04B Kalk , LIME

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