Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    New search for: HIDAKA NOBUHIRO
    New search for: MIURA YUKIO
    New search for: ARIKAWA JUN
    New search for: KUGIMOTO HIRONORI

    A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3); and a pair of intermediate layers (6, 7) that are interposed between the pair of ceramic plates (2, 3) and the conductive layer (4) and are in contact with the pair of ceramic plates (2, 3) and the conductive layer (4).

    Access

    Download

    Access

    Download

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    New search for: HIDAKA NOBUHIRO
    New search for: MIURA YUKIO
    New search for: ARIKAWA JUN
    New search for: KUGIMOTO HIRONORI

    A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3); and a pair of intermediate layers (6, 7) that are interposed between the pair of ceramic plates (2, 3) and the conductive layer (4) and are in contact with the pair of ceramic plates (2, 3) and the conductive layer (4).

    Access

    Download

    CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    New search for: HIDAKA NOBUHIRO
    New search for: MIURA YUKIO
    New search for: ARIKAWA JUN
    New search for: KUGIMOTO HIRONORI

    A ceramic joined body (1) includes: a pair of ceramic plates (2,3) that include a conductive material; a conductive layer (4) and an insulating layer (5) that are interposed between the pair of ceramic plates (2, 3); and a pair of intermediate layers (6, 7) that are interposed between the pair of ceramic plates (2, 3) and the conductive layer (4) and are in contact with the pair of ceramic plates (2, 3) and the conductive layer (4).

    Access

    Download

    Access

    Download

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    Contributors:

    HIDAKA NOBUHIRO (author) / MIURA YUKIO (author) / ARIKAWA JUN (author) / KUGIMOTO HIRONORI (author)

    Publication date:

    2023-02-09

    Type of media:

    Patent

    Type of material:

    Electronic Resource

    Language:

    English

    Classification:

    IPC:  H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / C04B Kalk , LIME

    Similar titles

    CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    MIURA YUKIO / HIDAKA NOBUHIRO / ARIKAWA JUN et al. | European Patent Office | 2022

    Free access

    CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    MIURA YUKIO / HIDAKA NOBUHIRO / ARIKAWA JUN et al. | European Patent Office | 2021

    Free access

    CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    HIDAKA NOBUHIRO / MIURA YUKIO / ARIKAWA JUN et al. | European Patent Office | 2021

    Free access

    CERAMIC JOINED BODY, ELECTROSTATIC CHUCK DEVICE, AND METHOD FOR MANUFACTURING CERAMIC JOINED BODY

    ARIKAWA JUN / HIDAKA NOBUHIRO / MIURA YUKIO et al. | European Patent Office | 2023

    Free access

    CERAMIC JOINED BODY, ELECTROSTATIC CHUCKING DEVICE, AND METHOD FOR PRODUCING CERAMIC JOINED BODY

    ARIKAWA JUN / HIDAKA NOBUHIRO / MIURA YUKIO | European Patent Office | 2023

    Free access
    Back to top