Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
SEMICONDUCTOR MEMORY DEVICE
A semiconductor memory device includes an interlayer insulating layer, a plurality of first contact pads embedded in the interlayer insulating layer, a plurality of first work function adjustment patterns embedded in the interlayer insulating layer and disposed on the plurality of first contact pads, and a plurality of lower electrodes disposed on the plurality of first work function adjustment patterns.
SEMICONDUCTOR MEMORY DEVICE
A semiconductor memory device includes an interlayer insulating layer, a plurality of first contact pads embedded in the interlayer insulating layer, a plurality of first work function adjustment patterns embedded in the interlayer insulating layer and disposed on the plurality of first contact pads, and a plurality of lower electrodes disposed on the plurality of first work function adjustment patterns.
SEMICONDUCTOR MEMORY DEVICE
JEON INTAK (Autor:in) / LIM HANJIN (Autor:in) / JUNG HYUNGSUK (Autor:in)
09.11.2023
Patent
Elektronische Ressource
Englisch
IPC:
H10B
SEMICONDUCTOR DEVICE, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR MEMORY DEVICE
| Europäisches Patentamt | 2023