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    Method for Manufacturing ScAlN Target

    The invention relates to a method for producing a scandium aluminum nitride (ScAlN) target body for pulsed laser deposition (PLD), which includes the steps of: providing a scandium aluminum alloy body; pulverizing the scandium aluminum alloy body into scandium aluminum particles; nitridizing the scandium aluminum particles into scandium aluminum nitride particles; and hot pressing the scandium aluminum nitride particles into a scandium aluminum nitride target body.

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    Method for Manufacturing ScAlN Target

    The invention relates to a method for producing a scandium aluminum nitride (ScAlN) target body for pulsed laser deposition (PLD), which includes the steps of: providing a scandium aluminum alloy body; pulverizing the scandium aluminum alloy body into scandium aluminum particles; nitridizing the scandium aluminum particles into scandium aluminum nitride particles; and hot pressing the scandium aluminum nitride particles into a scandium aluminum nitride target body.

    Zugriff

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    Method for Manufacturing ScAlN Target

    The invention relates to a method for producing a scandium aluminum nitride (ScAlN) target body for pulsed laser deposition (PLD), which includes the steps of: providing a scandium aluminum alloy body; pulverizing the scandium aluminum alloy body into scandium aluminum particles; nitridizing the scandium aluminum particles into scandium aluminum nitride particles; and hot pressing the scandium aluminum nitride particles into a scandium aluminum nitride target body.

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    Zugriff

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    Titel:

    Method for Manufacturing ScAlN Target

    Beteiligte:

    HOPMAN WILLEM CORNELIS LAMBERT (Autor:in) / DEKKERS JAN MATTHIJN (Autor:in)

    Erscheinungsdatum:

    10.10.2024

    Medientyp:

    Patent

    Format:

    Elektronische Ressource

    Sprache:

    Englisch

    Klassifikation:

    IPC:  C23C Beschichten metallischer Werkstoffe , COATING METALLIC MATERIAL / C04B Kalk , LIME

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