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Method for Manufacturing ScAlN Target
The invention relates to a method for producing a scandium aluminum nitride (ScAlN) target body for pulsed laser deposition (PLD), which includes the steps of: providing a scandium aluminum alloy body; pulverizing the scandium aluminum alloy body into scandium aluminum particles; nitridizing the scandium aluminum particles into scandium aluminum nitride particles; and hot pressing the scandium aluminum nitride particles into a scandium aluminum nitride target body.
Method for Manufacturing ScAlN Target
The invention relates to a method for producing a scandium aluminum nitride (ScAlN) target body for pulsed laser deposition (PLD), which includes the steps of: providing a scandium aluminum alloy body; pulverizing the scandium aluminum alloy body into scandium aluminum particles; nitridizing the scandium aluminum particles into scandium aluminum nitride particles; and hot pressing the scandium aluminum nitride particles into a scandium aluminum nitride target body.
Method for Manufacturing ScAlN Target
HOPMAN WILLEM CORNELIS LAMBERT (author) / DEKKERS JAN MATTHIJN (author)
2024-10-10
Patent
Electronic Resource
English
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