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    Ceramic material, method for manufacturing the same, and semiconductor manufacturing apparatus member

    Neue Suche nach: SATO YOSUKE
    Neue Suche nach: INOUE KATSUHIRO
    Neue Suche nach: KATSUDA YUJI

    The ceramic material of the present invention contains a crystalline phase of a complex oxide containing a Group II element M and a rare earth element RE. The Group II element M is Sr, Ca, or Ba. An XRD diagram of the ceramic material shows a first new peak between peaks derived from the (040) plane and the (320) plane of MRE2O4. Such a ceramic material may be manufactured by, for example, preparing a material containing MRE2O4 or a material capable of reacting in thermal spray flame to produce MRE2O4 as a thermal spray material, and thermally spraying the thermal spray material onto a predetermined object.

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    Ceramic material, method for manufacturing the same, and semiconductor manufacturing apparatus member

    Neue Suche nach: SATO YOSUKE
    Neue Suche nach: INOUE KATSUHIRO
    Neue Suche nach: KATSUDA YUJI

    The ceramic material of the present invention contains a crystalline phase of a complex oxide containing a Group II element M and a rare earth element RE. The Group II element M is Sr, Ca, or Ba. An XRD diagram of the ceramic material shows a first new peak between peaks derived from the (040) plane and the (320) plane of MRE2O4. Such a ceramic material may be manufactured by, for example, preparing a material containing MRE2O4 or a material capable of reacting in thermal spray flame to produce MRE2O4 as a thermal spray material, and thermally spraying the thermal spray material onto a predetermined object.

    Zugriff

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    Ceramic material, method for manufacturing the same, and semiconductor manufacturing apparatus member

    Neue Suche nach: SATO YOSUKE
    Neue Suche nach: INOUE KATSUHIRO
    Neue Suche nach: KATSUDA YUJI

    The ceramic material of the present invention contains a crystalline phase of a complex oxide containing a Group II element M and a rare earth element RE. The Group II element M is Sr, Ca, or Ba. An XRD diagram of the ceramic material shows a first new peak between peaks derived from the (040) plane and the (320) plane of MRE2O4. Such a ceramic material may be manufactured by, for example, preparing a material containing MRE2O4 or a material capable of reacting in thermal spray flame to produce MRE2O4 as a thermal spray material, and thermally spraying the thermal spray material onto a predetermined object.

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    Titel:

    Ceramic material, method for manufacturing the same, and semiconductor manufacturing apparatus member

    Beteiligte:

    SATO YOSUKE (Autor:in) / INOUE KATSUHIRO (Autor:in) / KATSUDA YUJI (Autor:in)

    Erscheinungsdatum:

    02.01.2018

    Medientyp:

    Patent

    Format:

    Elektronische Ressource

    Sprache:

    Englisch

    Klassifikation:

    IPC:  C04B Kalk , LIME / C01F COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS , Verbindungen der Metalle Beryllium, Magnesium, Aluminium, Calcium, Strontium, Barium, Radium, Thorium oder der Seltenen Erden

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