A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Ceramic material, method for manufacturing the same, and semiconductor manufacturing apparatus member
The ceramic material of the present invention contains a crystalline phase of a complex oxide containing a Group II element M and a rare earth element RE. The Group II element M is Sr, Ca, or Ba. An XRD diagram of the ceramic material shows a first new peak between peaks derived from the (040) plane and the (320) plane of MRE2O4. Such a ceramic material may be manufactured by, for example, preparing a material containing MRE2O4 or a material capable of reacting in thermal spray flame to produce MRE2O4 as a thermal spray material, and thermally spraying the thermal spray material onto a predetermined object.
Ceramic material, method for manufacturing the same, and semiconductor manufacturing apparatus member
The ceramic material of the present invention contains a crystalline phase of a complex oxide containing a Group II element M and a rare earth element RE. The Group II element M is Sr, Ca, or Ba. An XRD diagram of the ceramic material shows a first new peak between peaks derived from the (040) plane and the (320) plane of MRE2O4. Such a ceramic material may be manufactured by, for example, preparing a material containing MRE2O4 or a material capable of reacting in thermal spray flame to produce MRE2O4 as a thermal spray material, and thermally spraying the thermal spray material onto a predetermined object.
Ceramic material, method for manufacturing the same, and semiconductor manufacturing apparatus member
SATO YOSUKE (author) / INOUE KATSUHIRO (author) / KATSUDA YUJI (author)
2018-01-02
Patent
Electronic Resource
English
| European Patent Office | 2017
| European Patent Office | 2018
European Patent Office | 2018
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