Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Piezoelectric element, piezoelectric actuator device, liquid ejecting head, liquid ejecting apparatus, and ultrasonic measuring apparatus
Provided is a piezoelectric element in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on a substrate, the piezoelectric layer being formed of composite oxide having a perovskite structure which contains at least Pb, Nb, and Ti, in which the piezoelectric layer has a tetragonal crystal structure, the crystal is oriented to {100} against the substrate, and regions are mixed in a crystal lattice, each region including a (100) plane and a (001) plane which are orthogonal to a stacking direction, and the composite oxide of the piezoelectric layer is represented by the following general expression. xPb Ni 1 / 3 ¢ Nb 2 / 3 ¢ O 3 - yPbZrO 3 - zPbTiO 3 10 ¤ x ¤ 40 , 0 < y ¤ 40 , 50 ¤ z ¤ 90
Piezoelectric element, piezoelectric actuator device, liquid ejecting head, liquid ejecting apparatus, and ultrasonic measuring apparatus
Provided is a piezoelectric element in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on a substrate, the piezoelectric layer being formed of composite oxide having a perovskite structure which contains at least Pb, Nb, and Ti, in which the piezoelectric layer has a tetragonal crystal structure, the crystal is oriented to {100} against the substrate, and regions are mixed in a crystal lattice, each region including a (100) plane and a (001) plane which are orthogonal to a stacking direction, and the composite oxide of the piezoelectric layer is represented by the following general expression. xPb Ni 1 / 3 ¢ Nb 2 / 3 ¢ O 3 - yPbZrO 3 - zPbTiO 3 10 ¤ x ¤ 40 , 0 < y ¤ 40 , 50 ¤ z ¤ 90
Piezoelectric element, piezoelectric actuator device, liquid ejecting head, liquid ejecting apparatus, and ultrasonic measuring apparatus
ITAYAMA YASUHIRO (Autor:in) / YONEMURA TAKAYUKI (Autor:in)
06.02.2018
Patent
Elektronische Ressource
Englisch
| Europäisches Patentamt | 2016
Liquid-ejecting head, liquid-ejecting apparatus, piezoelectric element, and piezoelectric material
| Europäisches Patentamt | 2017
PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS
| Europäisches Patentamt | 2015
Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
| Europäisches Patentamt | 2015
liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
| Europäisches Patentamt | 2015