Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
CERAMIC COMPONENT AND METHOD FOR MANUFACTURING CERAMIC COMPONENT
An embodiment relates to a ceramic component and a method for manufacturing a ceramic component, and provides a ceramic component containing boron carbide, wherein residual stresses measured on the surfaces of two points having different distances from the center thereof are S1 and S2, respectively, and the difference between S1 and S2 is -600 to +600 MP. According to an embodiment, a ceramic component used in equipment for manufacturing a semiconductor element can be efficiently manufactured while being improved in quality.
Un mode de réalisation se rapporte à un composant céramique et à un procédé de fabrication d'un composant céramique, et fournit un composant céramique contenant du carbure de bore, les contraintes résiduelles mesurées sur les surfaces de deux points ayant des distances différentes par rapport au centre de ces derniers étant respectivement S1 et S2, et la différence entre S1 et S2 étant comprise entre -600 et +600 MP. Selon un mode de réalisation, un composant céramique utilisé dans un équipement pour fabriquer un élément semi-conducteur peut être fabriqué efficacement tout en étant amélioré en termes de qualité.
구현예는 세라믹 부품 및 세라믹 부품의 제조방법에 관한 것으로, 보론카바이드를 포함하고, 중심에서 거리가 서로 다른 두 지점의 표면에서 측정한 잔류응력은 각각 S1과 S2이고, 상기 S1과 S2의 차이는 -600 내지 +600 MP인, 세라믹 부품을 제공한다. 구현예에 따르면, 품질을 향상시키면서 동시에 효율적으로 반도체 소자를 제조하는 장비에 사용되는 세라믹 부품을 제조할 수 있다.
CERAMIC COMPONENT AND METHOD FOR MANUFACTURING CERAMIC COMPONENT
An embodiment relates to a ceramic component and a method for manufacturing a ceramic component, and provides a ceramic component containing boron carbide, wherein residual stresses measured on the surfaces of two points having different distances from the center thereof are S1 and S2, respectively, and the difference between S1 and S2 is -600 to +600 MP. According to an embodiment, a ceramic component used in equipment for manufacturing a semiconductor element can be efficiently manufactured while being improved in quality.
Un mode de réalisation se rapporte à un composant céramique et à un procédé de fabrication d'un composant céramique, et fournit un composant céramique contenant du carbure de bore, les contraintes résiduelles mesurées sur les surfaces de deux points ayant des distances différentes par rapport au centre de ces derniers étant respectivement S1 et S2, et la différence entre S1 et S2 étant comprise entre -600 et +600 MP. Selon un mode de réalisation, un composant céramique utilisé dans un équipement pour fabriquer un élément semi-conducteur peut être fabriqué efficacement tout en étant amélioré en termes de qualité.
구현예는 세라믹 부품 및 세라믹 부품의 제조방법에 관한 것으로, 보론카바이드를 포함하고, 중심에서 거리가 서로 다른 두 지점의 표면에서 측정한 잔류응력은 각각 S1과 S2이고, 상기 S1과 S2의 차이는 -600 내지 +600 MP인, 세라믹 부품을 제공한다. 구현예에 따르면, 품질을 향상시키면서 동시에 효율적으로 반도체 소자를 제조하는 장비에 사용되는 세라믹 부품을 제조할 수 있다.
CERAMIC COMPONENT AND METHOD FOR MANUFACTURING CERAMIC COMPONENT
COMPOSANT CÉRAMIQUE ET PROCÉDÉ DE FABRICATION DE COMPOSANT CÉRAMIQUE
세라믹 부품 및 세라믹 부품의 제조방법
HWANG SUNGSIC (Autor:in) / OH JUNROK (Autor:in) / MIN KYOUNGYEOL (Autor:in) / KIM KYUNGIN (Autor:in) / KANG JUNGKUN (Autor:in) / HAN YOUNGUK (Autor:in)
19.08.2021
Patent
Elektronische Ressource
Koreanisch
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