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    CERAMIC COMPONENT AND METHOD FOR MANUFACTURING CERAMIC COMPONENT

    Neue Suche nach: HWANG SUNGSIC
    Neue Suche nach: OH JUNROK
    Neue Suche nach: MIN KYOUNGYEOL
    Neue Suche nach: KIM KYUNGIN
    Neue Suche nach: KANG JUNGKUN
    Neue Suche nach: HAN YOUNGUK

    The present disclosure relates to a ceramic component and a manufacturing method of a ceramic component, and provides a ceramic component comprising boron carbide, wherein residual stress values measured at surface of two spots with different distances from a center are respectively S1 and S2, and a difference between the S1 and S2 is -600 to +600 MP. According to the present disclosure, it is possible to manufacture a ceramic component improved in the quality and simultaneously efficiently used in apparatus for manufacturing a semiconductor element.

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    CERAMIC COMPONENT AND METHOD FOR MANUFACTURING CERAMIC COMPONENT

    Neue Suche nach: HWANG SUNGSIC
    Neue Suche nach: OH JUNROK
    Neue Suche nach: MIN KYOUNGYEOL
    Neue Suche nach: KIM KYUNGIN
    Neue Suche nach: KANG JUNGKUN
    Neue Suche nach: HAN YOUNGUK

    The present disclosure relates to a ceramic component and a manufacturing method of a ceramic component, and provides a ceramic component comprising boron carbide, wherein residual stress values measured at surface of two spots with different distances from a center are respectively S1 and S2, and a difference between the S1 and S2 is -600 to +600 MP. According to the present disclosure, it is possible to manufacture a ceramic component improved in the quality and simultaneously efficiently used in apparatus for manufacturing a semiconductor element.

    Zugriff

    Download

    CERAMIC COMPONENT AND METHOD FOR MANUFACTURING CERAMIC COMPONENT

    Neue Suche nach: HWANG SUNGSIC
    Neue Suche nach: OH JUNROK
    Neue Suche nach: MIN KYOUNGYEOL
    Neue Suche nach: KIM KYUNGIN
    Neue Suche nach: KANG JUNGKUN
    Neue Suche nach: HAN YOUNGUK

    The present disclosure relates to a ceramic component and a manufacturing method of a ceramic component, and provides a ceramic component comprising boron carbide, wherein residual stress values measured at surface of two spots with different distances from a center are respectively S1 and S2, and a difference between the S1 and S2 is -600 to +600 MP. According to the present disclosure, it is possible to manufacture a ceramic component improved in the quality and simultaneously efficiently used in apparatus for manufacturing a semiconductor element.

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    Zugriff

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    Ähnliche Titel

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    Titel:

    CERAMIC COMPONENT AND METHOD FOR MANUFACTURING CERAMIC COMPONENT

    Weitere Titelangaben:

    KERAMISCHES BAUTEIL UND VERFAHREN ZUM HERSTELLEN EINES KERAMISCHEN BAUTEILS
    COMPOSANT CÉRAMIQUE ET PROCÉDÉ DE FABRICATION DE COMPOSANT CÉRAMIQUE

    Beteiligte:

    HWANG SUNGSIC (Autor:in) / OH JUNROK (Autor:in) / MIN KYOUNGYEOL (Autor:in) / KIM KYUNGIN (Autor:in) / KANG JUNGKUN (Autor:in) / HAN YOUNGUK (Autor:in)

    Erscheinungsdatum:

    07.02.2024

    Medientyp:

    Patent

    Format:

    Elektronische Ressource

    Sprache:

    Englisch

    Klassifikation:

    IPC:  C04B Kalk , LIME / H01J Elektrische Entladungsröhren oder Entladungslampen , ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES

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