Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Excimer laser beam scanning chemical vapor deposition of ultrathin multilayer films for soft x-ray mirrors (Invited Paper) [2403-21]

    New search for: Mutoh, K.
    New search for: Yamada, Y.
    New search for: Takeyama, S.
    New search for: Miyata, T.
    New search for: Dobowski, J. J.
    New search for: SPIE

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Excimer laser beam scanning chemical vapor deposition of ultrathin multilayer films for soft x-ray mirrors (Invited Paper) [2403-21]

    New search for: Mutoh, K.
    New search for: Yamada, Y.
    New search for: Takeyama, S.
    New search for: Miyata, T.
    New search for: Dobowski, J. J.
    New search for: SPIE

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Excimer laser beam scanning chemical vapor deposition of ultrathin multilayer films for soft x-ray mirrors (Invited Paper) [2403-21]

    New search for: Mutoh, K.
    New search for: Yamada, Y.
    New search for: Takeyama, S.
    New search for: Miyata, T.
    New search for: Dobowski, J. J.
    New search for: SPIE

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Excimer laser beam scanning chemical vapor deposition of ultrathin multilayer films for soft x-ray mirrors (Invited Paper) [2403-21]

    Contributors:

    Mutoh, K. (author) / Yamada, Y. (author) / Takeyama, S. (author) / Miyata, T. (author) / Dobowski, J. J. / SPIE

    Conference:

    Conference, Laser-induced thin film processing ; 1995 ; San Jose; CA

    Published in:

    Laser-induced thin film processing ; 270-279

    PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING

    Publication date:

    1995-01-01

    Size:

    10 pages

    ISBN:

    0819417505

    ISSN:

    0361-0748

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    laser induced thin film processing , SPIE

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    New excimer ultraviolet sources for photo-assisted deposition of thin films: an alternative to excimer-laser-induced deposition (Invited Paper) [2403-23]

    Boyd, I. W. / Zhang, J.-Y. / Bergonzo, P. et al. | British Library Conference Proceedings | 1995

    Characterization of excimer lamp photo-deposited ultrathin oxynitride films [2403-24]

    Lynch, S. / O'Connor, G. M. / Crean, G. M. et al. | British Library Conference Proceedings | 1995

    Laser processing of thin films for optoelectronic devices (Invited Paper) [2403-22]

    Sugiura, H. / SPIE | British Library Conference Proceedings | 1995

    Alumina gamma-phase excimer laser synthesis: phenomenology of the process and properties of the material (Invited Paper) [2403-39]

    Laude, L. D. / SPIE | British Library Conference Proceedings | 1995

    Femtosecond-pulse laser processing of metallic and semiconducting thin films (Invited Paper) [2403-38]

    Krueger, J. / Kautek, W. / SPIE | British Library Conference Proceedings | 1995

    Back to top