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    Characterization of excimer lamp photo-deposited ultrathin oxynitride films [2403-24]

    New search for: Lynch, S.
    New search for: O'Connor, G. M.
    New search for: Crean, G. M.
    New search for: Zhang, J.-Y.
    New search for: Dobowski, J. J.
    New search for: SPIE

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    Characterization of excimer lamp photo-deposited ultrathin oxynitride films [2403-24]

    New search for: Lynch, S.
    New search for: O'Connor, G. M.
    New search for: Crean, G. M.
    New search for: Zhang, J.-Y.
    New search for: Dobowski, J. J.
    New search for: SPIE

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of excimer lamp photo-deposited ultrathin oxynitride films [2403-24]

    New search for: Lynch, S.
    New search for: O'Connor, G. M.
    New search for: Crean, G. M.
    New search for: Zhang, J.-Y.
    New search for: Dobowski, J. J.
    New search for: SPIE

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Characterization of excimer lamp photo-deposited ultrathin oxynitride films [2403-24]

    Contributors:

    Lynch, S. (author) / O'Connor, G. M. (author) / Crean, G. M. (author) / Zhang, J.-Y. (author) / Dobowski, J. J. / SPIE

    Conference:

    Conference, Laser-induced thin film processing ; 1995 ; San Jose; CA

    Published in:

    Laser-induced thin film processing ; 302-311

    PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING

    Publication date:

    1995-01-01

    Size:

    10 pages

    ISBN:

    0819417505

    ISSN:

    0361-0748

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    laser induced thin film processing , SPIE

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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